Development of an induction heating reactor for rapid catalytic CF4 decomposition

A novel catalytic reactor configuration based on the induction heating technique is proposed for the decomposition of CF₄. To demonstrate the feasibility of this concept, a commercial catalyst and induction heating module are employed. The experimental results demonstrated that the reactor provides a fast response time (approximately 3 min) in the decomposition of CF₄ (roughly 100 ppm), without the requirement for insulation or preheating. In addition, introduction of the induction heating technique was found to allow precise temperature control. Furthermore, empirical guidelines for optimizing the catalyst bed are established in terms of two design factors, namely the length/diameter ratio ($\ge$ 1.48) of the catalyst bed, and 1/3 of the blending of an additional inductive heating medium in the catalyst bed. The fast response time exhibited by this system is expected to permit connection of the reactor with electric power generated by renewable energy.