通过在圆柱表面进行确定性电镀释放自卷绕式三维电感器的性能（Adv.）

IF 6.4 3区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Advanced Materials Technologies Pub Date : 2024-05-22 DOI:10.1002/admt.202470043

Zhendong Yang, Apratim Khandelwal, Allen T. Wang, Kristen Nguyen, Scott Wicker, Yang Victoria Shao, Xiuling Li

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引用次数: 0

摘要

电镀在编号为 2400092 的文章中，Xiuling Li 及其合作者介绍了一种应变诱导自卷起膜 (S-RuM) 平台，该平台是一种与 CMOS 兼容的解决方案，可实现无源元件（包括电感器和电容器）的极小型化和片上集成。通过在 S-RuM 电感器阵列弯曲表面的壁和芯上采用后滚电镀技术，可以在不牺牲基底面的情况下提高品质因数和电感。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Unleashing the Performance of Self-Rolled-Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces (Adv. Mater. Technol. 10/2024)

Electroplating

In article number 2400092, Xiuling Li and co-workers introduce a strain-induced self-rolled-up membrane (S-RuM) platform that presents a CMOS-compatible solution for extreme miniaturization and on-chip integration of passive components including inductors and capacitors. By employing post-rolling electroplating on both the walls and core of the curved surfaces of S-RuM inductor arrays, enhancements to the quality factor and inductance can be achieved without sacrificing footprint.

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来源期刊

Advanced Materials Technologies Materials Science-General Materials Science

CiteScore

10.20

自引率

4.40%

发文量

566

期刊介绍： Advanced Materials Technologies Advanced Materials Technologies is the new home for all technology-related materials applications research, with particular focus on advanced device design, fabrication and integration, as well as new technologies based on novel materials. It bridges the gap between fundamental laboratory research and industry.