大气氩射频介质势垒放电的流体模拟:中性气体温度的作用

Ze-Hui Zhang, Ke-Xin Zhong, Yue Liu, Wei Wang, Yi-Nan Wang, De-Zheng Yang
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引用次数: 0

摘要

针对大气氩射频介质势垒放电,建立了基于粒子漂移-扩散近似的自洽一维流体模型,以研究中性气体温度对放电过程和等离子体特性的影响。结果表明,中性气体温度升高会导致电离率峰值降低和等离子体密度减小,但电场和电子温度变化不大。此外,放电模式从α模式过渡到α-γ模式的原因是,即使进入鞘的离子减少,但不断增长的离子通量会诱发更多的二次电子通量。此外,基态电离和基态激发是氩放电中的主要碰撞。当聚焦于逸散原子时,三体淬火也是一个重要的碰撞过程。
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Fluid simulation of atmospheric argon RF dielectric barrier discharges: Role of neutral gas temperature
For atmospheric argon RF dielectric barrier discharges, a self-consistent one-dimensional fluid model based on the drift-diffusive approximations of the particles is established to investigate the role of the neutral gas temperature on the discharge process and the plasma characteristics. A finite difference method is used to solve numerically the model, and the numerical results are obtained for the cases that the neutral gas temperature varies from 300 to 600 K. It shows that an increase in the neutral gas temperature causes a decrease in the ionization rate peak and a decrease in the plasma density, but the electric field and the electron temperature do not change very much. Moreover, the discharge mode transition from α mode to α-γ mode occurs because the growing ion flux induces more secondary electron flux, even if the ions entering the sheaths decrease. In addition, the ground state ionization and the ground state excitation are the main collisions in the argon discharges. When metastable atoms are focused on, the three-body quenching is also an important collision progress.
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