更正：高灵敏度晶圆级无转移石墨烯 MEMS 电容式麦克风。

IF 7.3 1区工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-06-04 eCollection Date: 2024-01-01 DOI:10.1038/s41378-024-00705-5

Roberto Pezone, Sebastian Anzinger, Gabriele Baglioni, Hutomo Suryo Wasisto, Pasqualina M Sarro, Peter G Steeneken, Sten Vollebregt

引用次数: 0

摘要

[此处更正了文章 DOI：10.1038/s41378-024-00656-x]。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.

[This corrects the article DOI: 10.1038/s41378-024-00656-x.].

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来源期刊

Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)

CiteScore

12.00

自引率

3.80%

发文量

123

审稿时长

20 weeks

期刊介绍： Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.