Yunwen Wu , Shenghong Ju , Feifei Li , Mengyun Zhang , Xiangyu Ren , Ming Li
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引用次数: 0
摘要
添加剂在实现高质量电沉积钴薄膜以用于微电子领域的各种应用中发挥着关键作用。本研究对含有 CC 和 -OH 功能基团的 1,4 丁炔二醇 (BYD)、具有 C = C 和 -OH 功能基团的 1,4 丁烯二醇 (BED) 以及只有 -OH 功能基团的乙二醇 (EG) 进行了研究,以揭示不饱和碳键对钴电沉积的潜在潜在机理。研究发现,BYD 既抑制了钴的沉积,也抑制了吸附氢的形成,从而形成了致密的钴膜。此外,还对电沉积钴的表面和横截面形态、晶粒结构和电阻率进行了表征,以研究炔醇添加剂的影响。结果表明,比亚迪会诱导表面形态发生变化,从拉长的脊和颗粒形状的混合物变为扁平的颗粒结构。加入 BYD 后,电沉积钴膜的纹理从 hcp(100) 和 hcp(101) 转变为 hcp(002),这是因为 BYD 对特定钴取向的选择性吸收。这项研究不仅调节了电沉积钴的晶粒取向和性质,而且加深了人们对不饱和碳键对钴电沉积的影响和机理的理解。这些发现为添加剂的选择及其实际应用提供了理论基础。
Tailoring crystalline orientation of electrodeposited cobalt by alkynol additives
Additives play a pivotal role in achieving high-quality electrodeposited cobalt films for diverse applications in microelectronics. In this work, 1,4-butynediol (BYD) bearing function groups of CC and -OH, 1,4-butenediol (BED) featuring C = C and -OH, and glycol (EG) with only -OH were studied to reveal the potential underlying mechanism of unsaturated carbon bonds on cobalt electrodeposition. It is found that BYD inhibits both the cobalt deposition and the formation of adsorbed hydrogen, forming compact cobalt film. Furthermore, the surface and cross-section morphology, grain structure, and resistivity of electrodeposited cobalt are characterized to investigate the effects of alkynol additives. It was observed that BYD induces a change in surface morphology from a mixture of elongated ridges and granular shapes to a flattened granular structure. The texture of the electrodeposited cobalt film transformed from hcp(100) and hcp(101) to hcp(002) with the addition of BYD due to the selective absorption of BYD on specific cobalt orientation. This study not only regulates the grains orientations and properties of electrodeposited cobalt, but also enhances the comprehension of the effect and mechanism of unsaturated carbon bonds on cobalt electrodeposition. These findings provide a theoretical foundation for the selection of additives and their practical applications.
期刊介绍:
Electrochimica Acta is an international journal. It is intended for the publication of both original work and reviews in the field of electrochemistry. Electrochemistry should be interpreted to mean any of the research fields covered by the Divisions of the International Society of Electrochemistry listed below, as well as emerging scientific domains covered by ISE New Topics Committee.