低成本、低功耗的诱导隧道场效应晶体管纳米片集成。

0 MATERIALS SCIENCE, MULTIDISCIPLINARY Discover nano Pub Date : 2024-07-02 DOI:10.1186/s11671-024-04036-2
Jyi-Tsong Lin, Chia-Yo Kuo
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引用次数: 0

摘要

纳米片晶体管有望成为未来下一代小型设备的首选。为了满足未来高性能和低功耗计算应用的需求,本研究提出了一种垂直堆叠设计的纳米片结构,具有高离子/离子交换比的特点。这种纳米片设计与诱导隧道场效应晶体管相结合。通过利用载流子迁移率是硅三倍的锗硅,并采用线隧道机制,该研究成功地实现了卓越的带间特性,从而改善了开关行为并降低了次阈值波动(SS)。我们对三种 TFET 类型进行了比较研究:纳米片 PIN TFET、纳米片肖特基 iTFET 和鳍式 iTFET。结果显示,纳米片 PIN TFET 的 ION/IOFF 比值较高,但 SSavg 值较低,为 47.63 mV/dec。然而,在硅锗体厚度为 3 nm 时,纳米片 iTFET 和鳍式 iTFET 都显示出更高的 ION/IOFF 比和更优越的 SSavg 值(17.64 mV/dec)。这些发现表明,纳米片 iTFET 和鳍式 iTFET 在低功耗、低热预算和快速开关应用方面具有潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Nanosheet integration of induced tunnel field-effect transistor with lower cost and lower power.

Nanosheet transistors are poised to become the preferred choice for the next generation of smaller-sized devices in the future. To address the future demand for high-performance and low-power computing applications, this study proposes a nanosheet structure with a vertically stacked design, featuring a high ION/IOFF ratio. This Nanosheet design is combined with an induced tunnel field-effect transistor. By utilizing SiGe with a carrier mobility three times that of Si and employing a line tunneling mechanism, the research successfully achieves superior Band to Band characteristics, resulting in improved switching behavior and a lower Subthreshold Swing (SS). Comparative studies were conducted on three TFET types: Nanosheet PIN TFET, Nanosheet Schottky iTFET, and Fin iTFET. Results show that the Nanosheet PIN TFET has a higher ION/IOFF ratio but poorer SSavg values at 47.63 mV/dec compared to the others. However, with a SiGe Body thickness of 3 nm, both Nanosheet iTFET and Fin iTFET exhibit higher ION/IOFF ratios and superior SSavg values at 17.64 mV/dec. These findings suggest the potential of Nanosheet iTFET and Fin iTFET for low-power, lower thermal budgets, and fast-switching applications.

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