用于实现 300 GHz 频带板条阵列的质子辐照 CMOS 片上 Vivaldi 天线

IF 3.5 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Open Journal of Antennas and Propagation Pub Date : 2024-07-03 DOI:10.1109/OJAP.2024.3422426
Hans Herdian;Chun Wang;Takeshi Inoue;Atsushi Shirane;Kenichi Okada
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引用次数: 0

摘要

随着CMOS收发器的工作频率达到亚毫米波,其电路面积无法跟上典型二维(2D)瓦片式相控阵拓扑的0.5 \lambda_0 \times 0.5 \lambda_0$ 面积限制的缩减。本文提出了一种端射片上 Vivaldi 天线,采用标准 65-nm CMOS 工艺,适用于 300 GHz 频段工作。之所以选择 Vivaldi 架构,是因为它具有宽带和端射辐射特性。板条阵列拓扑需要端射天线,这使得电路面积超过 0.5 \lambda_0 \times 0.5 \lambda_0$ 的收发器能够实现 2 D 阵列。天线长度被缩短,以最大限度地提高波束宽度并减小面积。此外,还增加了梳状槽,以抑制因长度过短而产生的侧叶和背辐射。为了防止高模表面波扭曲天线辐射模式并降低效率,基板被减薄到 50 \mu \mathrm{m}$ 。双层质子辐照工艺将衬底电阻率提高到 1 \mathrm{k}$ 。\Omega$ -cm,从而可以在低成本 CMOS 工艺上实现高效片上天线。制造的片上 Vivaldi 天线面积为 0.45 \lambda_0 \times 0.45 \lambda_0$ ,测量结果显示 220 GHz 至 320 GHz 范围内具有 6 dBi 增益和 1 dB 平整度(37% 带宽),270 GHz 时具有 76° E 平面波束宽度,效率为 87%。使用所提出的片上 Vivaldi 天线实现了 1 \times 4$ 的板条阵列,测量结果显示整个 E 平面的波束转向范围为 56°。
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A Proton Irradiated CMOS On-Chip Vivaldi Antenna for 300 GHz Band Slat Array Implementation
As the CMOS transceiver reaches the sub-millimeter wave operating frequency, its circuit area cannot keep up with the shrinkage of the $0.5 \lambda_0 \times 0.5 \lambda_0$ area limit for the typical 2-dimensional (2D) tile-based phased array topology. This article proposes an end-fire on-chip Vivaldi antenna on a standard 65-nm CMOS process for the 300 GHz band operation. The Vivaldi architecture was chosen for its broadband and end-fire radiation characteristics. End-fire antenna is required for slat array topology, which enables 2 D array implementation for transceivers with circuit area above $0.5 \lambda_0 \times 0.5 \lambda_0$ . The antenna length was shortened to maximize beamwidth and reduce area. Additionally, comb-shaped slots were added to suppress side lobes and back radiation caused by the short length. To prevent higher mode surface waves from distorting the antenna radiation pattern and reducing efficiency, the substrate was thinned to $50 \mu \mathrm{m}$ . A dual-layer proton irradiation process increases the substrate resistivity to $1 \mathrm{k} \Omega$ -cm, allowing high-efficiency on-chip antenna implementation on low-cost CMOS processes. The manufactured on-chip Vivaldi antenna has an area of $0.45 \lambda_0 \times 0.45 \lambda_0$ , with measurement results showing 6 dBi gain with 1 dB flatness from 220 GHz to 320 GHz (37% bandwidth) and 76° E-plane beamwidth at 270 GHz with 87% efficiency. A $1 \times 4$ slat array implementation using the proposed on-chip Vivaldi antenna has been demonstrated, with measurement results showing a 56° beam steering range across the E-plane.
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CiteScore
6.50
自引率
12.50%
发文量
90
审稿时长
8 weeks
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Front Cover Table of Contents Guest Editorial Introduction to the Special Section on Women’s Research in Antennas and Propagation Section (WRAPS) IEEE ANTENNAS AND PROPAGATION SOCIETY IEEE Open Journal of Antennas and Propagation Instructions for authors
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