使用金属/聚合物混合键合的 HRDL 互连技术及其特点

Yu-Lun Liu;Chien-Kang Hsiung;Tzu-Han Sun;Chun-Ta Li;Yuan-Chiu Huang;Yu-Tao Yang;Kuan-Neng Chen
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引用次数: 0

摘要

本文旨在全面探讨硅、玻璃、有机和 RDL(再分布层)互插器,比较它们的技术特点、优势和相关挑战。此外,文章还通过新的研究成果介绍了一种被称为 "超 RDL 内插件(HRDL)"的开创性技术,该技术集成了临时键合和低温混合键合技术,可创建具有低翘曲、高层数和最小热累积效应的 RDL 内插件。即将进行的讨论将严格研究插层技术对半导体行业和先进技术领域的影响,促进高性能计算(HPC)、人工智能(AI)和高带宽应用等关键领域的进步。
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The HRDL Interposer Technology Using Metal/Polymer Hybrid Bonding and Its Characteristics
This article aims to comprehensively explore silicon, glass, organic, and RDL (Redistribution Layer) interposers, comparing their technological features, advantages, and associated challenges. Additionally, a pioneering technology, termed Hyper RDL interposer (HRDL), which integrates temporary bonding and low-temperature hybrid bonding techniques to create an RDL interposer with low warpage, high layer count, and minimal thermal accumulation effects, is introduced through new research results. The forthcoming discussion will rigorously examine the impact of interposer technologies in the semiconductor industry and advanced technology sectors, facilitating progress in critical areas, including high-performance computing (HPC), artificial intelligence (AI), and high-bandwidth applications.
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