首页 > 最新文献

IEEE Transactions on Materials for Electron Devices最新文献

英文 中文
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing
Pub Date : 2025-02-03 DOI: 10.1109/TMAT.2025.3535909
{"title":"Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing","authors":"","doi":"10.1109/TMAT.2025.3535909","DOIUrl":"https://doi.org/10.1109/TMAT.2025.3535909","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"C3-C3"},"PeriodicalIF":0.0,"publicationDate":"2025-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10869512","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143105656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wide Band Gap Semiconductors for Automotive Applications Call for Papers 汽车用宽频带隙半导体征文
Pub Date : 2025-01-17 DOI: 10.1109/TMAT.2025.3529277
{"title":"Wide Band Gap Semiconductors for Automotive Applications Call for Papers","authors":"","doi":"10.1109/TMAT.2025.3529277","DOIUrl":"https://doi.org/10.1109/TMAT.2025.3529277","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"C3-C3"},"PeriodicalIF":0.0,"publicationDate":"2025-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10844544","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142993022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Call for Papers: Special Issue on Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to System-Level Applications 论文征集:探索多功能氧化物基电子器件的激动人心的世界特刊:从材料到系统级应用
Pub Date : 2025-01-17 DOI: 10.1109/TMAT.2025.3529352
{"title":"Call for Papers: Special Issue on Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to System-Level Applications","authors":"","doi":"10.1109/TMAT.2025.3529352","DOIUrl":"https://doi.org/10.1109/TMAT.2025.3529352","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"C3-C3"},"PeriodicalIF":0.0,"publicationDate":"2025-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10844545","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142993021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Announcing an IEEE/Optica Publishing Group Journal of Lightwave Technology Special Issue on: 宣布IEEE/Optica出版集团光波技术杂志特刊:
Pub Date : 2025-01-17 DOI: 10.1109/TMAT.2025.3529353
{"title":"Announcing an IEEE/Optica Publishing Group Journal of Lightwave Technology Special Issue on:","authors":"","doi":"10.1109/TMAT.2025.3529353","DOIUrl":"https://doi.org/10.1109/TMAT.2025.3529353","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"C3-C3"},"PeriodicalIF":0.0,"publicationDate":"2025-01-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10844543","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142993023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
2024 Index IEEE Transactions on Materials for Electron Devices Vol. 1 电子器件材料学报第1卷
Pub Date : 2025-01-14 DOI: 10.1109/TMAT.2025.3529194
{"title":"2024 Index IEEE Transactions on Materials for Electron Devices Vol. 1","authors":"","doi":"10.1109/TMAT.2025.3529194","DOIUrl":"https://doi.org/10.1109/TMAT.2025.3529194","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"222-229"},"PeriodicalIF":0.0,"publicationDate":"2025-01-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10841915","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142976040","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Framework for Exploring Gate-Dielectric Materials for High-Performance Two-Dimensional Field-Effect-Transistors 高性能二维场效应晶体管栅极介电材料的研究框架
Pub Date : 2024-12-09 DOI: 10.1109/TMAT.2024.3513236
Ankit Kumar;Lin Xu;Albert Ho;Arnab Pal;Kunjesh Agashiwala;Kamyar Parto;Wei Cao;Kaustav Banerjee
The choice and engineering of the gate-dielectric (GD) is of paramount importance to the performance and energy-efficiency of two-dimensional (2D) field-effect-transistors (FETs) that are considered to be primary candidates for sub-10 nm gate length (Lg) metal-oxide-semiconductor FETs (MOSFETs). Despite remarkable progress achieved in recent years by the semiconductor-industry towards realization of high-performance 2D FETs based on transition-metal dichalcogenides (TMDs), achieving fast switching speeds and low device leakage currents remain an open challenge. More specifically, the effect of traps at the dielectric-2D interface and bulk defects in the dielectric on device performance have not been thoroughly investigated. In this paper, taking a common 2D-TMD material molybdenum disulfide (MoS2) as an example, we explore various GDs and dielectric-stacks – their interfaces, traps and defects, by using rigorous ab-initio density-functional-theory (DFT) and non-equilibrium-Green's-function (NEGF) transport. Our framework and analysis provide valuable insights into the design of n-type 2D MoS2 FETs, including their gate leakage (IGL), subthreshold swing (SS), and ON-current (ION), and they can be extended to optimize the design and performance of other 2D FETs. More specifically, we demonstrate that monolayer (1L-) and bilayer (2L-) LaOCl/HfO2 are promising GD stacks to achieve IRDS required values for IGL, SS, and ION in n-type 2D FETs. Finally, we develop a framework to derive the design-window in terms of material/interface properties valid for both n-type and p-type 2D FETs and identify potential GD materials as a passivation/seeding layer across different Lg for n-type 2D FETs. The results highlight LaOCl as a promising candidate for Lg = 7 nm while several materials, including LaOCl and hBN, are viable for Lg = 10 nm.
栅极介电体(GD)的选择和工程设计对二维场效应晶体管(fet)的性能和能效至关重要,它们被认为是小于10 nm栅极长度(Lg)金属氧化物半导体场效应晶体管(mosfet)的主要候选器件。尽管近年来半导体工业在实现基于过渡金属二硫族化物(TMDs)的高性能二维场效应管方面取得了显著进展,但实现快速开关速度和低器件漏电流仍然是一个公开的挑战。更具体地说,介电-二维界面上的陷阱和介电体缺陷对器件性能的影响尚未得到深入研究。本文以一种常见的2D-TMD材料二硫化钼(MoS2)为例,利用严格的从头算密度泛函理论(DFT)和非平衡格林函数(NEGF)输运,探讨了各种GDs和介电堆的界面、陷阱和缺陷。我们的框架和分析为n型2D MoS2 fet的设计提供了有价值的见解,包括栅漏(IGL)、亚阈值摆幅(SS)和导通电流(ION),并且可以扩展到优化其他2D fet的设计和性能。更具体地说,我们证明了单层(1L-)和双层(2L-) LaOCl/HfO2是有前途的GD堆叠,可以在n型2D fet中实现IGL, SS和ION所需的IRDS值。最后,我们开发了一个框架来推导适用于n型和p型二维场效应管的材料/界面特性的设计窗口,并确定潜在的GD材料作为跨不同Lg的n型二维场效应管的钝化/播种层。结果表明,LaOCl是Lg = 7 nm的有希望的候选材料,而包括LaOCl和hBN在内的几种材料在Lg = 10 nm是可行的。
{"title":"A Framework for Exploring Gate-Dielectric Materials for High-Performance Two-Dimensional Field-Effect-Transistors","authors":"Ankit Kumar;Lin Xu;Albert Ho;Arnab Pal;Kunjesh Agashiwala;Kamyar Parto;Wei Cao;Kaustav Banerjee","doi":"10.1109/TMAT.2024.3513236","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3513236","url":null,"abstract":"The choice and engineering of the gate-dielectric (GD) is of paramount importance to the performance and energy-efficiency of two-dimensional (2D) field-effect-transistors (FETs) that are considered to be primary candidates for sub-10 nm gate length (L\u0000<sub>g</sub>\u0000) metal-oxide-semiconductor FETs (MOSFETs). Despite remarkable progress achieved in recent years by the semiconductor-industry towards realization of high-performance 2D FETs based on transition-metal dichalcogenides (TMDs), achieving fast switching speeds and low device leakage currents remain an open challenge. More specifically, the effect of traps at the dielectric-2D interface and bulk defects in the dielectric on device performance have not been thoroughly investigated. In this paper, taking a common 2D-TMD material molybdenum disulfide (MoS\u0000<sub>2</sub>\u0000) as an example, we explore various GDs and dielectric-stacks – their interfaces, traps and defects, by using rigorous ab-initio density-functional-theory (DFT) and non-equilibrium-Green's-function (NEGF) transport. Our framework and analysis provide valuable insights into the design of n-type 2D MoS\u0000<sub>2</sub>\u0000 FETs, including their gate leakage (I\u0000<sub>GL</sub>\u0000), subthreshold swing (SS), and ON-current (I\u0000<sub>ON</sub>\u0000), and they can be extended to optimize the design and performance of other 2D FETs. More specifically, we demonstrate that monolayer (1L-) and bilayer (2L-) LaOCl/HfO\u0000<sub>2</sub>\u0000 are promising GD stacks to achieve IRDS required values for I\u0000<sub>GL</sub>\u0000, SS, and I\u0000<sub>ON</sub>\u0000 in n-type 2D FETs. Finally, we develop a framework to derive the design-window in terms of material/interface properties valid for both n-type and p-type 2D FETs and identify potential GD materials as a passivation/seeding layer across different L\u0000<sub>g</sub>\u0000 for n-type 2D FETs. The results highlight LaOCl as a promising candidate for L\u0000<sub>g</sub>\u0000 = 7 nm while several materials, including LaOCl and \u0000<italic>h</i>\u0000BN, are viable for L\u0000<sub>g</sub>\u0000 = 10 nm.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"211-220"},"PeriodicalIF":0.0,"publicationDate":"2024-12-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142912585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
IEEE Electron Devices Society Information IEEE电子器件协会信息
Pub Date : 2024-12-03 DOI: 10.1109/TMAT.2024.3469608
{"title":"IEEE Electron Devices Society Information","authors":"","doi":"10.1109/TMAT.2024.3469608","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3469608","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"C2-C2"},"PeriodicalIF":0.0,"publicationDate":"2024-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10772478","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142761429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Editorial An Era of Surfaces 社论 一个表面的时代
Pub Date : 2024-11-25 DOI: 10.1109/TMAT.2024.3486974
FRANCESCA IACOPI
{"title":"Editorial An Era of Surfaces","authors":"FRANCESCA IACOPI","doi":"10.1109/TMAT.2024.3486974","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3486974","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"iii-iv"},"PeriodicalIF":0.0,"publicationDate":"2024-11-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10766942","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142713868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optoelectrical Dynamic of Perovskite Solar Cells Under Perovskite and Electron Transport Layer Crystallinity Effect 钙钛矿和电子传输层结晶度效应下钙钛矿太阳能电池的光电动力学
Pub Date : 2024-11-18 DOI: 10.1109/TMAT.2024.3501212
Akrajas Ali Umar;P. Susthita Menon
This paper discusses a specific case regarding how the behavior of the perovskite lattice and the crystallinity properties of the electron transport layer (ETL) impact the photoelectrical dynamics in perovskite solar cells (PSCs). While many factors influence this photovoltaic process, including the properties of the perovskite layer, ETL, hole transport layer (HTL), and the interfacial properties between these components, the fundamental phenomena occurring within each layer are quite similar. By examining the properties of the perovskite layer and ETL, we can gain valuable insights into how they collectively influence the transport of photogenerated carriers in PSCs. This brief review aims to shed light on these key aspects, thus catalyzing efforts to enhance the performance of perovskite solar cells. Understanding the underlying dynamics at play will enable researchers to devise more targeted strategies to optimize PSCs, ultimately realizing their full potential in renewable energy applications.
本文讨论了钙钛矿晶格的行为和电子传输层(ETL)的结晶性如何影响钙钛矿太阳能电池(PSCs)的光电动力学。虽然影响这一光伏过程的因素很多,包括钙钛矿层、ETL、空穴传输层(HTL)的性质以及这些组件之间的界面性质,但每一层内部发生的基本现象是非常相似的。通过检查钙钛矿层和ETL的性质,我们可以获得有价值的见解,了解它们如何共同影响psc中光生载流子的输运。这篇简短的综述旨在阐明这些关键方面,从而促进提高钙钛矿太阳能电池性能的努力。了解潜在的动态将使研究人员能够设计出更有针对性的策略来优化psc,最终实现其在可再生能源应用中的全部潜力。
{"title":"Optoelectrical Dynamic of Perovskite Solar Cells Under Perovskite and Electron Transport Layer Crystallinity Effect","authors":"Akrajas Ali Umar;P. Susthita Menon","doi":"10.1109/TMAT.2024.3501212","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3501212","url":null,"abstract":"This paper discusses a specific case regarding how the behavior of the perovskite lattice and the crystallinity properties of the electron transport layer (ETL) impact the photoelectrical dynamics in perovskite solar cells (PSCs). While many factors influence this photovoltaic process, including the properties of the perovskite layer, ETL, hole transport layer (HTL), and the interfacial properties between these components, the fundamental phenomena occurring within each layer are quite similar. By examining the properties of the perovskite layer and ETL, we can gain valuable insights into how they collectively influence the transport of photogenerated carriers in PSCs. This brief review aims to shed light on these key aspects, thus catalyzing efforts to enhance the performance of perovskite solar cells. Understanding the underlying dynamics at play will enable researchers to devise more targeted strategies to optimize PSCs, ultimately realizing their full potential in renewable energy applications.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"194-210"},"PeriodicalIF":0.0,"publicationDate":"2024-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142810265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Future Materials for Beyond Si Integrated Circuits: A Perspective 超硅集成电路的未来材料展望
Pub Date : 2024-11-13 DOI: 10.1109/TMAT.2024.3497835
Luigi Colombo;Salim El Kazzi;Mihaela Popovici;Gilles Delie;Dae Seon Kwon;Sean RC McMitchell;Christoph Adelmann
The integration of novel materials has been pivotal in advancing Si-based devices ever since Si became the preferred material for transistors, and later, integrated circuits. New materials have rapidly been adopted in recent decades to enhance the performance of Si integrated circuits. The imperative to uphold Moore's Law for both More Moore and More than Moore devices has driven the industry to study, and later introduce a plethora of materials and innovative processes into the Si fabrication process, spanning from the front-end-of-line (FEOL) to the back-end-of-line (BEOL). This concerted effort aims to bolster computing power and functionality while curbing costs. Scaling Si-channel transistors down to the nanometer level has presented formidable challenges. The emergence of new materials, such as two-dimensional materials like transition metal dichalcogenides, carbon nanotubes, and metal oxides holds promise for further scaling endeavors. With transistors and interconnects nearing their physical limits, these materials offer potential solutions by enabling the fabrication of high-performance devices without relying solely on Si, while integrated at lower thermal budgets. Moreover, these technologies can be repurposed in the BEOL to add extra functionality while reducing the overall device footprint. Recent breakthroughs, notably the successful demonstration of high-performance devices utilizing ALD metal oxides like In2O3, have sparked considerable excitement. Addressing the scaling challenges of interconnects is equally daunting. The quest for materials with lower resistivities than copper interconnects with reduced electromigration at scaled dimensions and efforts to eliminate or minimize barrier layers hold promise in mitigating RC time delay. Non-volatile memories, particularly ferroelectric-based memories, stand to be gained from advancements in materials science. Innovations in such materials as hafnates and enhanced integration techniques for perovskites through electrode stack engineering could facilitate the scaling of current ferroelectric memories. The ongoing introduction of new materials is poised to sustain scaling efforts and unlock novel functionalities in electronic devices for many years.
自从硅成为晶体管和后来的集成电路的首选材料以来,新材料的集成一直是推进硅基器件的关键。近几十年来,新材料被迅速采用,以提高硅集成电路的性能。对于More Moore和More than Moore器件来说,维护摩尔定律的必要性推动了该行业的研究,并随后在Si制造过程中引入了大量的材料和创新工艺,从前端线(FEOL)到后端线(BEOL)。这种协同的努力旨在增强计算能力和功能,同时控制成本。将硅沟道晶体管缩小到纳米级是一个艰巨的挑战。新材料的出现,如过渡金属二硫族化合物、碳纳米管和金属氧化物等二维材料,为进一步扩大规模带来了希望。随着晶体管和互连接近其物理极限,这些材料提供了潜在的解决方案,使制造高性能器件无需完全依赖于Si,同时集成在更低的热预算。此外,这些技术可以在BEOL中重新利用,以增加额外的功能,同时减少整体设备占用空间。最近的突破,特别是利用ALD金属氧化物(如In2O3)的高性能器件的成功演示,引发了相当大的兴奋。解决互连的规模挑战同样令人生畏。寻求比铜互连具有更低电阻率的材料,在缩放尺寸上减少电迁移,并努力消除或最小化屏障层,有望减轻RC时间延迟。非易失性存储器,特别是基于铁电的存储器,将从材料科学的进步中获得。诸如铪酸盐等材料的创新和通过电极堆叠工程增强的钙钛矿集成技术可以促进当前铁电存储器的缩放。正在进行的新材料的引入准备维持规模的努力,并解锁多年的电子设备的新功能。
{"title":"Future Materials for Beyond Si Integrated Circuits: A Perspective","authors":"Luigi Colombo;Salim El Kazzi;Mihaela Popovici;Gilles Delie;Dae Seon Kwon;Sean RC McMitchell;Christoph Adelmann","doi":"10.1109/TMAT.2024.3497835","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3497835","url":null,"abstract":"The integration of novel materials has been pivotal in advancing Si-based devices ever since Si became the preferred material for transistors, and later, integrated circuits. New materials have rapidly been adopted in recent decades to enhance the performance of Si integrated circuits. The imperative to uphold Moore's Law for both More Moore and More than Moore devices has driven the industry to study, and later introduce a plethora of materials and innovative processes into the Si fabrication process, spanning from the front-end-of-line (FEOL) to the back-end-of-line (BEOL). This concerted effort aims to bolster computing power and functionality while curbing costs. Scaling Si-channel transistors down to the nanometer level has presented formidable challenges. The emergence of new materials, such as two-dimensional materials like transition metal dichalcogenides, carbon nanotubes, and metal oxides holds promise for further scaling endeavors. With transistors and interconnects nearing their physical limits, these materials offer potential solutions by enabling the fabrication of high-performance devices without relying solely on Si, while integrated at lower thermal budgets. Moreover, these technologies can be repurposed in the BEOL to add extra functionality while reducing the overall device footprint. Recent breakthroughs, notably the successful demonstration of high-performance devices utilizing ALD metal oxides like In\u0000<sub>2</sub>\u0000O\u0000<sub>3</sub>\u0000, have sparked considerable excitement. Addressing the scaling challenges of interconnects is equally daunting. The quest for materials with lower resistivities than copper interconnects with reduced electromigration at scaled dimensions and efforts to eliminate or minimize barrier layers hold promise in mitigating RC time delay. Non-volatile memories, particularly ferroelectric-based memories, stand to be gained from advancements in materials science. Innovations in such materials as hafnates and enhanced integration techniques for perovskites through electrode stack engineering could facilitate the scaling of current ferroelectric memories. The ongoing introduction of new materials is poised to sustain scaling efforts and unlock novel functionalities in electronic devices for many years.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"178-193"},"PeriodicalIF":0.0,"publicationDate":"2024-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142810264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
IEEE Transactions on Materials for Electron Devices
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1