{"title":"脉冲间隔对大功率脉冲磁控溅射沉积类金刚石碳的影响","authors":"","doi":"10.1016/j.diamond.2024.111424","DOIUrl":null,"url":null,"abstract":"<div><p>A diamond-like carbon (DLC) film was deposited using unipolar-double-pulse high-power pulsed magnetron sputtering, aimed at enhancing both film density and deposition rate. The pulse interval between the 1st and 2nd pulses, with negative polarity applied to the target, was varied from 15 to 200 μs. Temporal variations in the flux and energy of C<sup>+</sup> and Ar<sup>+</sup> incident to the DLC film were analyzed through energy-resolved and time-resolved mass spectrometry to clarify the ion generation process during the 1st and 2nd pulses. The contribution of ionic species in forming the DLC film through HiPIMS was clarified through mass spectrometry, Raman scattering spectroscopy, and X-ray reflectivity analyses. Reducing the pulse interval increased the deposition rate, and the film density of the DLC film was improved at a pulse interval of approximately 40 μs. Overall, the implementation of a double pulse with the appropriate pulse interval can help enhance both the film density and deposition rate.</p></div>","PeriodicalId":11266,"journal":{"name":"Diamond and Related Materials","volume":null,"pages":null},"PeriodicalIF":4.3000,"publicationDate":"2024-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of pulse interval on deposition of diamond-like carbon through high-power impulse magnetron sputtering\",\"authors\":\"\",\"doi\":\"10.1016/j.diamond.2024.111424\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A diamond-like carbon (DLC) film was deposited using unipolar-double-pulse high-power pulsed magnetron sputtering, aimed at enhancing both film density and deposition rate. The pulse interval between the 1st and 2nd pulses, with negative polarity applied to the target, was varied from 15 to 200 μs. Temporal variations in the flux and energy of C<sup>+</sup> and Ar<sup>+</sup> incident to the DLC film were analyzed through energy-resolved and time-resolved mass spectrometry to clarify the ion generation process during the 1st and 2nd pulses. The contribution of ionic species in forming the DLC film through HiPIMS was clarified through mass spectrometry, Raman scattering spectroscopy, and X-ray reflectivity analyses. Reducing the pulse interval increased the deposition rate, and the film density of the DLC film was improved at a pulse interval of approximately 40 μs. Overall, the implementation of a double pulse with the appropriate pulse interval can help enhance both the film density and deposition rate.</p></div>\",\"PeriodicalId\":11266,\"journal\":{\"name\":\"Diamond and Related Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2024-07-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Diamond and Related Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S092596352400637X\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Diamond and Related Materials","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S092596352400637X","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
Effect of pulse interval on deposition of diamond-like carbon through high-power impulse magnetron sputtering
A diamond-like carbon (DLC) film was deposited using unipolar-double-pulse high-power pulsed magnetron sputtering, aimed at enhancing both film density and deposition rate. The pulse interval between the 1st and 2nd pulses, with negative polarity applied to the target, was varied from 15 to 200 μs. Temporal variations in the flux and energy of C+ and Ar+ incident to the DLC film were analyzed through energy-resolved and time-resolved mass spectrometry to clarify the ion generation process during the 1st and 2nd pulses. The contribution of ionic species in forming the DLC film through HiPIMS was clarified through mass spectrometry, Raman scattering spectroscopy, and X-ray reflectivity analyses. Reducing the pulse interval increased the deposition rate, and the film density of the DLC film was improved at a pulse interval of approximately 40 μs. Overall, the implementation of a double pulse with the appropriate pulse interval can help enhance both the film density and deposition rate.
期刊介绍：
DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices.
The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.
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