Christopher Kurth;Zhewei Zhang;Kevin Roderick;Jay Kendall Weingardt;Richard Lopez;Hwee Kiang;Peter Navaneethakrishnan;Deena Starkel
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引用次数: 0
摘要
半导体制造需要大量经过一系列复杂处理工艺产生的高纯水。反渗透(RO)作为最关键的水处理工艺,在半导体制造超纯水(UPW)制备过程中贡献了大部分能耗和碳排放。然而,围绕螺旋缠绕反渗透元件中进料流道的现有设计,我们有机会推动创新,以提高能效和节约成本。在这项研究中,采用 3D 打印间隔条的新型进料流道设计与采用网状间隔条的传统进料流道设计在能耗方面进行了比较。结果发现,在相同的渗透流速下,3D 打印隔板的平均水头压力比网状隔板低 20 psi,比功率低至 0.449 kWh/m3,比网状隔板节能 20%。这项研究表明,这种采用三维打印隔板的新型通道结构通过减少压力损失和增加活性面积,显著提高了反渗透的整体能效,并具有减少防垢剂用量和膜清洗的潜在优点。
Comparison of Semiconductor Reverse Osmosis System Performance With Conventional and 3D Printed Feed Channels
Semiconductor manufacturing requires a substantial amount of high-purity water generated through a complex series of treatment processes. Reverse Osmosis (RO) as the most crucial water treatment process contributes the majority of energy consumption and carbon emission in Ultra-Pure Water (UPW) preparation for semiconductor manufacturing. However, there is an opportunity to drive innovation around the current design of feed flow channel in spiral wound RO elements to promote energy efficiency and cost savings. In this study, a novel design of feed channel with 3D printed spacers was compared with conventional design of feed channel with mesh spacers regarding energy consumption. The average head pressure of 3D printed spacer was found to be 20 psi lower than mesh spacer with same permeate flow rate, which achieved a lower specific power of 0.449 kWh/m3, resulting in a 20% energy saving compared with mesh spacer. This study demonstrated that this novel channel construction with 3D printed spacer significantly improves the overall energy efficiency in RO through reduced pressure loss and increased active area, with a potential merit of decreasing the anti-scalant usage and membrane cleaning.
期刊介绍:
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.