利用射频常压等离子体制备具有优势 (001) 面的氧化钛薄膜

Yu Zhang, Haozhe Wang, Jie Cui, Tao He, Yu Xu, Jing Zhang
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引用次数: 0

摘要

由于具有广泛的工业应用和重要的基础研究价值,具有主要(001)面的无相二氧化钛纳米片薄膜(TF-1)引起了广泛的研究兴趣。在这项工作中,我们采用射频(RF)脉冲调制等离子体,以氢氟酸(HF)为形貌控制剂(MCA),在短时间(20 分钟)内制备了在石英基底上具有良好附着力的 TF-1。通过扫描电子显微镜图像,可以在 TF-1 表面观察到许多交叉的纳米片,这提供了更多暴露的活性(001)面。通过 XRD 图样和拉曼光谱估算了截断程度(B/A)和暴露(001)面的百分比(S001/S),由于 HF 的存在,这两项指标均有所提高。XPS 结果表明,F 原子只是吸附在锐钛矿表面,而不是掺杂到二氧化钛晶格中。密度泛函理论(DFT)研究了氟化氢对锐钛矿二氧化钛纳米片生长的作用,揭示了化学吸附氟(F)原子对(001)表面的稳定作用,从而促进其优先生长。
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Anatase TiO2 film with dominant (001) facets prepared by radio frequency atmospheric pressure plasma
Anatase TiO2 nanosheets film with dominant (001) facets (TF-1) has attracted widespread research interest owing to wide-ranging industrial applications and fundamental importance. In this work, we prepared TF-1 with well adhesion on quartz substate in a short time (20 min) by radio frequency (RF) pulse-modulated plasma with hydrofluoric acid (HF) as the morphology controlling agent (MCA). Many intercrossed nanosheets were observed on the surface of TF-1 through SEM images, which provides more exposed reactive (001) facets. The degree of truncation (B/A) and the percentage of exposed (001) facets (S001/S) were estimated by XRD patterns and Raman spectra, which have been increased due to the presence of HF. XPS results indicate that F atoms are only adsorbed on anatase surface rather than doped into TiO2 lattice. The functions of HF on the growth of anatase TiO2 nanosheets were studied by density functional theory (DFT), revealing the stabilization effects associated with chemisorbed fluorine (F) atoms over (001) surface, and thus stimulating its preferred growth.
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