Linearizing AFM raster scans acquired using dual-stage lateral scanners

Dual-stage scanners can successfully increase the range of atomic force microscope (AFM) scanners in space and/or frequency by designing and constructing two nanopositioners with significant differences in static and dynamic characteristics. In such cases, the positioning signal has to be split to meet the displacement and frequency limitations of each stage. Without closed-loop displacement measurement sensors, linearizing images acquired using signals split in time and frequency can be challenging. A common method, often cumbersome and time consuming, uses inverse model-based feedforward compensation. In this work, we show that image-based linearization can be used to achieve acceptable results for raster scans acquired using dual-stage scanners. In particular, we apply the feedforward and image-based methods to our homemade dual-stage lateral scanner and high-speed AFM (HS-AFM) system. The acquired scans compare well for the two methods, indicating that image-based raster scan linearization can be used in place of inverse model-based feedforward approaches.