使用快速 X 射线猝发成像的微型芯片细部特征。

IF 50.5 1区 综合性期刊 Q1 MULTIDISCIPLINARY SCIENCES Nature Pub Date : 2024-07-31 DOI:10.1038/d41586-024-02377-7
Tais Gorkhover,  Daniela Rupp
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引用次数: 0

摘要

随着计算机芯片上元件的缩小,其结构的成像也变得越来越复杂。一种利用 X 射线猝发的方法可提供高分辨率的快速可视化,直至单晶体管级别。集成电路的 X 射线成像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Microchip minutiae imaged using rapid X-ray bursts
As components on a computer chip shrink, their structure becomes ever-more complicated to image. A method that uses bursts of X-rays offers high-resolution, rapid-fire visualization down to single-transistor level. X-ray imaging of integrated circuits.
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来源期刊
Nature
Nature 综合性期刊-综合性期刊
CiteScore
90.00
自引率
1.20%
发文量
3652
审稿时长
3 months
期刊介绍: Nature is a prestigious international journal that publishes peer-reviewed research in various scientific and technological fields. The selection of articles is based on criteria such as originality, importance, interdisciplinary relevance, timeliness, accessibility, elegance, and surprising conclusions. In addition to showcasing significant scientific advances, Nature delivers rapid, authoritative, insightful news, and interpretation of current and upcoming trends impacting science, scientists, and the broader public. The journal serves a dual purpose: firstly, to promptly share noteworthy scientific advances and foster discussions among scientists, and secondly, to ensure the swift dissemination of scientific results globally, emphasizing their significance for knowledge, culture, and daily life.
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