带 SiO$_{\text{2}}$ 钝化层的硅基肖特基势垒准垂直氮化镓二极管在通态应力偏压下的可靠性

IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Transactions on Electron Devices Pub Date : 2024-08-08 DOI:10.1109/TED.2024.3433310
Ya-Xun Lin;Der-Sheng Chao;Jenq-Horng Liang;Yao-Luen Shen;Chih-Fang Huang;Steve Hall;Ivona Z. Mitrovic
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引用次数: 0

摘要

本文研究了带有二氧化硅钝化层的氮化镓准垂直肖特基势垒二极管(SBD)在状态应力诱导下的器件降解。在室温下,通过在三个不同的电压下分别对器件施加 500 秒的偏压,对器件进行了应力测试。与未进行二氧化硅钝化的对照器件相比,钝化器件的降解程度较轻。由于金属/氮化镓界面附近的块状陷阱的影响,对照器件出现了降解。此外,阳极在零电压下保持 500 秒,以分析 SBD 恢复阶段的电子去陷阱机制。测量了 SBD 的电流-电压特性,以监测在应力和恢复条件下周期性中断时正向电压和势垒高度的演变。利用幂律模型和通用恢复函数分别评估了每个阶段参数随时间的变化。结果表明,与钝化层相关的边界和体氧化物陷阱导致了电子的捕获和去捕获。此外,长时间不变的块状氧化物陷阱被认为是部分恢复的促成因素,这表明在短期恢复阶段很少有电子从这些陷阱中发射出来。
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Reliability of Quasi-vertical GaN on Silicon Schottky Barrier Diodes With SiO₂ Passivation Layer Under On-State Stress Bias
On-state stress induced device degradation of gallium nitride quasivertical Schottky barrier diode (SBD) with SiO2 passivation layer was investigated in this article. The devices were stressed at room temperature by biasing them separately at three distinct voltages for 500 s. The longer-term degradation was seen to be dominated predominantly by electron trapping in the oxide passivation layer. Less-severe degradation was observed in passivated devices in comparison with control devices without SiO2 passivation. The control devices were found to exhibit degradation due to the influence of bulk traps near to the metal/GaN interface. Moreover, the anode was held at zero voltage for 500 s to analyse the electron de-trapping mechanism during the recovery phase of SBDs. Current-voltage characteristics of the SBDs were measured to monitor the evolution of forward voltage and barrier height through periodic interruption under stress and recovery. A power-law model and universal recovery function were utilized to evaluate the parameter shifts with respect to time for each phase, respectively. The results demonstrate that border and bulk oxide traps associated with the passivation layer lead to the trapping and de-trapping of electrons. Furthermore, long-time constant bulk oxide traps are thought to be the contributing factor in the partial recovery, indicating that few electrons emit from these traps in the short-term recovery phase.
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来源期刊
IEEE Transactions on Electron Devices
IEEE Transactions on Electron Devices 工程技术-工程:电子与电气
CiteScore
5.80
自引率
16.10%
发文量
937
审稿时长
3.8 months
期刊介绍: IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.
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