Experimental electronic stopping cross section of titanium for slow hydrogen, deuterium, and helium ions

The electronic stopping cross section of Ti for light ions is measured in an energy range of 1.3–5.0 keV for H⁺, and 1.5–10.0 keV for He⁺. All measurements were performed using in-situ Time-of-Flight Low-Energy Ion Scattering (ToF-LEIS) on ultrathin Ti layers, enabling absolute energy loss measurements. Monte-Carlo simulations are used to fit the experimental spectra and to extract the stopping cross section quantitatively. The free electron gas model is applied to collect additional information on the electronic stopping of light ions in Ti. We further compare the presented experimental data with previously published experimental data, semi-empirical models, and theoretical predictions.