由交织梳组成的可切换声表面波谐振器和梯形滤波器

R. Alcorta Galván;C. Croënne;B. Dubus;B. Loiseaux;E. Eustache;M. Bertrand;A.-C. Hladky-Hennion
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引用次数: 0

摘要

这项工作介绍了在铌酸锂基底上制造的可切换声表面波谐振器的开发情况,该谐振器利用电布拉格带隙概念来控制谐振频率。改变电极阵列的电气条件可移动其带隙中心频率,进而改变谐振器的有效腔长和谐振频率。这种方法利用了声表面波器件中已有的电极,从而降低了潜在可调谐声表面波元件的复杂性。在本文中,构成空腔镜面的电极被连接成 IDCP(互插梳齿对),从而减少了操作所需的开关数量。本文采用有限元法 (FEM) 模拟分析谐振器的运行,并讨论了设计中的难点。我们制作了所选谐振器结构的固定版本(不可能切换)和可切换版本,以通过实验展示谐振器的运行情况。实验发现,可以设计出只需一个开关的可切换声表面波谐振器,其相对频率跃迁约为 2.3%。最后,还制作了冷冻单单元和 4 单元梯形滤波器,作为可切换声表面波滤波器的概念验证。
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Switchable SAW Resonators and Ladder Filters Composed of Interdigitated Combs
This work presents the development of switchable surface acoustic wave (SAW) resonators fabricated on a LiNbO3 substrate, which uses the electrical Bragg bandgap concept to control the resonance frequency. The modification of the electrical condition of electrode arrays shifts their bandgap center frequency, which in turn changes the effective cavity length and resonance frequency of the resonator. This method uses the electrodes already present in SAW devices, thus reducing the complexity of potentially tunable SAW components. In this article, the electrodes that make up the cavity mirrors are connected into interdigitated comb pairs (IDCPs), reducing the necessary number of switches for operation. Finite-element method (FEM) simulations are used to analyze resonator operation and design difficulties are discussed. Frozen (with no possibility of switching) and switchable versions of a chosen resonator structure are fabricated to experimentally showcase resonator operation. It is found that it is possible to design switchable SAW resonators, which require a single switch and present a relative frequency jump of around 2.3%. Finally, frozen single-cell and four-cell ladder filters are fabricated as a proof of concept of a switchable SAW filter.
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来源期刊
CiteScore
7.70
自引率
16.70%
发文量
583
审稿时长
4.5 months
期刊介绍: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control includes the theory, technology, materials, and applications relating to: (1) the generation, transmission, and detection of ultrasonic waves and related phenomena; (2) medical ultrasound, including hyperthermia, bioeffects, tissue characterization and imaging; (3) ferroelectric, piezoelectric, and piezomagnetic materials, including crystals, polycrystalline solids, films, polymers, and composites; (4) frequency control, timing and time distribution, including crystal oscillators and other means of classical frequency control, and atomic, molecular and laser frequency control standards. Areas of interest range from fundamental studies to the design and/or applications of devices and systems.
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