使用基于 GAA-JLT 的气体传感器对甲醇、氯仿和二氯甲烷进行灵敏度分析

IF 2.7 Q2 PHYSICS, CONDENSED MATTER Micro and Nanostructures Pub Date : 2024-08-02 DOI:10.1016/j.micrna.2024.207947
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引用次数: 0

摘要

由于全栅极结构有望在未来的技术节点中得到普及,我们在这项工作中对基于导电聚合物(CP)栅极的全栅极无结晶体管(GAA-JLT)无标记气体传感器的设计进行了模拟研究。在工作的最初阶段,我们重点研究了 n 器件和传感器性能随 CP 初始功函数的变化,这取决于其生长条件和主掺杂。与各种测试气体的相互作用会改变 CP 的特性,从而改变其功函数。因此会观察到器件特性的变化,这种变化可作为评估基于 GAA-JLT 的气体传感器性能的指标。我们研究了不同测试气体存在时器件特性的变化。此外,我们还研究了传感器性能在与不同测试气体相互作用时的变化。我们还研究了环境温度和测试气体分压等工作条件对传感性能的影响。此外,还评估了设备尺寸对传感性能的影响。我们的计算结果表明,通过选择适当的主掺杂浓度模型和适当调整工作条件来调整 CP 的初始功函数,可以提高传感器的性能精度。
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Sensitivity analysis of methanol, chloroform, and dichloromethane using GAA-JLT-based gas sensor

Owing to the fact that the gate-all-around architecture is expected to prevail in the upcoming technology nodes, in this work we have taken up a simulation-based investigation on design of a gate-all-around junctionless transistor (GAA-JLT) based label-free gas sensor with conducting polymer (CP) gate. In the initial part of our work we have focused on the variation n device and sensor performance with initial work function of the CP, which depends upon its growth condition and primary doping. Interaction with various test gases modifies the CP characteristics, thereby changing its work function. Due to this a change in device characteristics is observed, which serves as the metric for assessing the GAA-JLT-based gas sensor performance. We have investigated the variation in device characteristics in the presence of different test gases. Further, the variation in sensor performance on interaction with the different test gases has been examined. The impact of operating conditions such as ambient temperature and partial pressure of the test gas on the sensing performance has been investigated. The impact of device dimension on the sensing performance has also been evaluated. Our computations reflect that tuning the initial work function of the CP by choosing the proper primary dopant concentration model along with proper tuning of the operating conditions can enhance the performance accuracy of the sensor.

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