期刊介绍： The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

期刊最新文献

Overlay Measurement Algorithm for Moirè Targets Using Frequency Analysis Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics Machine Learning Based Universal Threshold Voltage Extraction of Transistors Using Convolutional Neural Networks A Novel Multi-Modal Learning Approach for Cross-Process Defect Classification in TFT-LCD Array Manufacturing Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry

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