用于高精度位移传感的微型光机电系统：综述。

IF 3 3区工程技术 Q2 CHEMISTRY, ANALYTICAL Micromachines Pub Date : 2024-08-06 DOI:10.3390/mi15081011

Chenguang Xin, Yingkun Xu, Zhongyao Zhang, Mengwei Li

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引用次数: 0

摘要

高精度位移传感技术已广泛应用于科学研究和工业领域。近年来，人们对开发微机电系统（MOEMS）的兴趣为微型位移传感器提供了一个绝佳的平台。过去几年中，该领域取得了长足进步，目前正在开发集成式高精度传感器，这些传感器在光声光谱学、高精度定位和自动化等应用领域显示出巨大潜力。在这篇综述中，我们简要总结了基于 MOEMS 的高精度位移传感的不同技术，并讨论了未来改进所面临的挑战。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review.

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.

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来源期刊

Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION

CiteScore

5.20

自引率

14.70%

发文量

1862

审稿时长

16.31 days

期刊介绍： Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.