Binpeng Zhan, Jialu Li, Weiting Liu, Liang Hu, Xin Fu
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Physical constraint flow field reconstruction method for immersion scan-step flow
The lithography immersion flow field is highly sensitive to minor variations due to the precision demands of lithography. The scanning flow induces pressure fluctuations on the lens surface, subsequently impacting the quality of exposure. Previous measurement methods have encountered sparse distribution measurements on the lens surface due to limitations in sensor size and flow field dimensions. In this manuscript, the authors propose a modal fusion flow field reconstruction method, effectively integrating sensor-based experimental methods and equation-based computational methods. This method achieves high-resolution measurements of stress distribution and velocity distribution. Initially, a simulation of the flow field under operational conditions is conducted to acquire a dataset, followed by decomposing the dataset into modes to establish a modal library. Throughout the measurement process, the modal library is dynamically restructured based on sensor signal using a sparse representation method to forecast the flow field, and subsequently, the flow field is corrected in accordance with the Navier-Stokes equation.
期刊介绍:
Flow Measurement and Instrumentation is dedicated to disseminating the latest research results on all aspects of flow measurement, in both closed conduits and open channels. The design of flow measurement systems involves a wide variety of multidisciplinary activities including modelling the flow sensor, the fluid flow and the sensor/fluid interactions through the use of computation techniques; the development of advanced transducer systems and their associated signal processing and the laboratory and field assessment of the overall system under ideal and disturbed conditions.
FMI is the essential forum for critical information exchange, and contributions are particularly encouraged in the following areas of interest:
Modelling: the application of mathematical and computational modelling to the interaction of fluid dynamics with flowmeters, including flowmeter behaviour, improved flowmeter design and installation problems. Application of CAD/CAE techniques to flowmeter modelling are eligible.
Design and development: the detailed design of the flowmeter head and/or signal processing aspects of novel flowmeters. Emphasis is given to papers identifying new sensor configurations, multisensor flow measurement systems, non-intrusive flow metering techniques and the application of microelectronic techniques in smart or intelligent systems.
Calibration techniques: including descriptions of new or existing calibration facilities and techniques, calibration data from different flowmeter types, and calibration intercomparison data from different laboratories.
Installation effect data: dealing with the effects of non-ideal flow conditions on flowmeters. Papers combining a theoretical understanding of flowmeter behaviour with experimental work are particularly welcome.