多物理场控制固定研磨垫的复合图案设计和研磨性能研究

Zhongyu Bao , Congfu Fang , Zhongwei Hu , Zhen Yan
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引用次数: 0

摘要

本研究提供了一种创新的固定研磨垫复合图案设计方法,解决了研磨过程中不均匀的研磨流场、压力场和速度场引起的加工不均匀性和钝化堵塞等问题。首先,提供了一种多物理场建模方法,建立了材料去除分布模型和研磨垫性能评估标准,并验证了该模型的可靠性。其次,根据模型设计了一种带有螺旋槽和同心微槽的复合图案研磨垫。与网格研磨垫进行了对比实验。结果表明,复合图案研磨垫的堵塞和钝化性能得到了改善,压力分布也得到了优化。与网格研磨垫相比,在 20 N-70 N 的压力范围内,蓝宝石的表面粗糙度 Ra 降低了 6.4 %-25.42 %,工件表面的脆性断裂凹坑和划痕等缺陷减少,工件表面质量明显提高。材料去除率在 0.23 μm/min 至 0.34 μm/min 之间。这证实了基于多物理场优化研磨垫图案设计的有效性。研究成果为研磨垫图案设计提供了一种具有工程应用价值的新方法。
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Research on composite pattern design and lapping performance of fixed abrasive pads controlled by multi-physical fields

The present work provides an innovative method of composite pattern design for fixed abrasive pads, addressing issues such as machining non-uniformity and passivation blockage arising from uneven lapping flow, pressure, and velocity fields in lapping. First, a multi-physical field modeling method is provided, a material removal distribution model and evaluation criteria for the performance of the abrasive pad are established, and the reliability of this model is validated. Second, based on the model, a composite pattern abrasive pad coupled with a spiral groove and concentric micro groove is designed. Comparative experiments are conducted with the grid abrasive pad. The results show that the clogging and passivation performance of the composite pattern abrasive pad is improved, and the pressure distribution is optimized. Compared with the grid abrasive pad, in the pressure range of 20 N–70 N, the surface roughness Ra of sapphire is reduced by 6.4 %–25.42 %, defects such as brittle fracture pits and scratches on the workpiece surface are reduced, and the surface quality of the workpiece is significantly improved. The material removal rate is between 0.23 μm/min to 0.34 μm/min. This confirms the effectiveness of optimizing abrasive pad pattern design based on multi-physics fields. The research results provide a novel approach for abrasive pad pattern design with engineering application value.

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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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