多千兆赫铌酸锂机电谐振器的非接触式激励。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-09-05 DOI:10.1038/s41378-024-00771-9
Danqing Wang, Jiacheng Xie, Yu Guo, Mohan Shen, Hong X Tang
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引用次数: 0

摘要

从传感和计时到先进的通信设备,各种应用领域对高性能机电谐振器的需求与日俱增。在正在探索的机电材料中,薄膜铌酸锂因其强大的压电特性和低声损耗而脱颖而出。然而,在几乎所有现有的铌酸锂机电设备中,电极都是与机械谐振器直接接触。这种结构会带来不理想的质量负载效应,产生杂散模式和额外阻尼。在这里,我们提出了一种机电平台,利用倒装芯片键合技术将电极与机械谐振器分离,从而缓解了这一难题。通过将电极从谐振器中分离出来,我们的方法大大提高了这些谐振器的品质因数,为增强其器件应用的性能和可靠性铺平了道路。
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Noncontact excitation of multi-GHz lithium niobate electromechanical resonators.

The demand for high-performance electromechanical resonators is ever-growing across diverse applications, ranging from sensing and time-keeping to advanced communication devices. Among the electromechanical materials being explored, thin-film lithium niobate stands out due to its strong piezoelectric properties and low acoustic loss. However, in nearly all existing lithium niobate electromechanical devices, the configuration is such that the electrodes are in direct contact with the mechanical resonator. This configuration introduces an undesirable mass-loading effect, producing spurious modes and additional damping. Here, we present an electromechanical platform that mitigates this challenge by leveraging a flip-chip bonding technique to separate the electrodes from the mechanical resonator. By offloading the electrodes from the resonator, our approach yields a substantial increase in the quality factor of these resonators, paving the way for enhanced performance and reliability for their device applications.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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