The n-MoO3/p-Si heterojunction photodiode: Influence of the MoO3 film thickness on the ultraviolet and infrared photodetector performance

Here, we studied the effect of the MoO₃ thin film thickness on the ultraviolet (UV) and infrared (IR) photodiode properties of the n-MoO₃/p-Si heterojunction structure. Initially, the metal molybdenum (Mo) thin films with different thicknesses (50,150, and 250 nm) were created via DC magnetron sputtering on a p-type Si substrate. Then, the MoO₃ thin films were synthesized using a thermal oxidation method with an optimal oxygen flow rate of 60sccm. XRD and Raman analysis showed that the structure of prepared thin films has converted from an amorphous to an orthorhombic (α-MoO₃) crystalline phase with increasing thickness. The optical transmittance of the layers was tuned by controlling the thickness, and the maximum transmittance for the 50 nm-thick film was achieved in the broad wavelength range of 300–1100 nm. The current density–voltage (J–V) characteristics indicate the prepared samples' rectifying behavior under dark conditions. The heterojunction photodiode with a 50 nm-thick MoO₃ layer shows the best performance. This sample had a maximum amount of transmittance in the UV–visible and IR regions, compared to other samples, which leads to efficient electron-hole separation and transportation. This sample demonstrates a significant photoresponse ratio (I_Light/I_Dark) of about 55 and 52.5 in the ultraviolet (UV) and infrared (IR) regions, respectively.