{"title":"光栅位移传感器的高细分和光波动不敏感方法","authors":"","doi":"10.1016/j.optlaseng.2024.108545","DOIUrl":null,"url":null,"abstract":"<div><p>This paper presents an innovative GPI-NCCSR subdivision approach for grating displacement sensor based on grating projection imaging (GPI) and normalized cross-correlation sub-pixel registration (NCCSR) algorithm, achieving high subdivision within the grating pitch and exhibiting robust immunity to fluctuations in light source intensity. The GPI method facilitates the creation of long-period longitudinal moiré fringes more readily, and capturing moiré fringe information with a line-scan CCD allows for an extremely high subdivision. The NCCSR approach to displacement detection is impervious to signal amplitude fluctuations, thus enhancing the stability of the subdivision. Moreover, the sub-pixel registration algorithm can improve resolution even further. The experiments demonstrate that the proposed subdivision method achieves a displacement resolution superior to 4nm<sub>RMS</sub>, indicating a subdivision multiple within the 20µm pitch exceeding 5000 while remaining unaffected by variations in light intensity. Besides, the sensor exhibits repeatability accuracy better than 0.05% across various measurement points, with a linearity of 0.17% within a 3mm range.</p></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":null,"pages":null},"PeriodicalIF":3.5000,"publicationDate":"2024-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A high subdivision and light fluctuation-insensitive approach for grating displacement sensors\",\"authors\":\"\",\"doi\":\"10.1016/j.optlaseng.2024.108545\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This paper presents an innovative GPI-NCCSR subdivision approach for grating displacement sensor based on grating projection imaging (GPI) and normalized cross-correlation sub-pixel registration (NCCSR) algorithm, achieving high subdivision within the grating pitch and exhibiting robust immunity to fluctuations in light source intensity. The GPI method facilitates the creation of long-period longitudinal moiré fringes more readily, and capturing moiré fringe information with a line-scan CCD allows for an extremely high subdivision. The NCCSR approach to displacement detection is impervious to signal amplitude fluctuations, thus enhancing the stability of the subdivision. Moreover, the sub-pixel registration algorithm can improve resolution even further. The experiments demonstrate that the proposed subdivision method achieves a displacement resolution superior to 4nm<sub>RMS</sub>, indicating a subdivision multiple within the 20µm pitch exceeding 5000 while remaining unaffected by variations in light intensity. Besides, the sensor exhibits repeatability accuracy better than 0.05% across various measurement points, with a linearity of 0.17% within a 3mm range.</p></div>\",\"PeriodicalId\":49719,\"journal\":{\"name\":\"Optics and Lasers in Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2024-09-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Lasers in Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0143816624005232\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0143816624005232","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
A high subdivision and light fluctuation-insensitive approach for grating displacement sensors
This paper presents an innovative GPI-NCCSR subdivision approach for grating displacement sensor based on grating projection imaging (GPI) and normalized cross-correlation sub-pixel registration (NCCSR) algorithm, achieving high subdivision within the grating pitch and exhibiting robust immunity to fluctuations in light source intensity. The GPI method facilitates the creation of long-period longitudinal moiré fringes more readily, and capturing moiré fringe information with a line-scan CCD allows for an extremely high subdivision. The NCCSR approach to displacement detection is impervious to signal amplitude fluctuations, thus enhancing the stability of the subdivision. Moreover, the sub-pixel registration algorithm can improve resolution even further. The experiments demonstrate that the proposed subdivision method achieves a displacement resolution superior to 4nmRMS, indicating a subdivision multiple within the 20µm pitch exceeding 5000 while remaining unaffected by variations in light intensity. Besides, the sensor exhibits repeatability accuracy better than 0.05% across various measurement points, with a linearity of 0.17% within a 3mm range.
期刊介绍:
Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods.
Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following:
-Optical Metrology-
Optical Methods for 3D visualization and virtual engineering-
Optical Techniques for Microsystems-
Imaging, Microscopy and Adaptive Optics-
Computational Imaging-
Laser methods in manufacturing-
Integrated optical and photonic sensors-
Optics and Photonics in Life Science-
Hyperspectral and spectroscopic methods-
Infrared and Terahertz techniques