用于快速三维容积成像的低电压驱动 MEMS 超声相控阵传感器

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-09-12 DOI:10.1038/s41378-024-00755-9
Yun Zhang, Tong Jin, Yining Deng, Zijie Zhao, Rui Wang, Qiong He, Jianwen Luo, Jiawei Li, Kang Du, Tao Wu, Chenfang Yan, Hao Zhang, Xinchao Lu, Chengjun Huang, Hang Gao
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引用次数: 0

摘要

可穿戴超声成像技术已成为一种新兴模式,可用于持续监测深层组织生理机能,提供重要的健康和疾病信息。快速容积成像可提供内在三维目标的全时空视图,是解读内部器官动态的理想选择。然而,现有的一维超声波换能器阵列提供的是二维图像,因此要克服时间分辨率和容积覆盖之间的权衡问题具有挑战性。此外,高驱动电压也限制了它们在可穿戴设备中的应用。利用微机电系统(MEMS)技术,我们报告了一种超声相控阵换能器,即二维压电微机械超声换能器(pMUT)阵列,该阵列由低电压驱动,与芯片兼容,可实现快速三维容积成像。通过将多个 pMUT 单元组合到一个单一的驱动通道/元件中,我们提出了一种创新的单元-元件-阵列设计和 pMUT 阵列的操作方法,可用于定量表征每个 pMUT 单元之间的关键耦合效应,从而实现 5 V 驱动的三维成像。pMUT 阵列在线状模型和血管模型实验中展示了覆盖范围为 40 mm × 40 mm × 70 mm 的快速容积成像,实现了 11 kHz 的高时间帧频。所提出的解决方案可快速提供深层组织病变的全容积视图,为深层组织中各种器官的长期可穿戴成像技术铺平了道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Wearable ultrasound imaging technology has become an emerging modality for the continuous monitoring of deep-tissue physiology, providing crucial health and disease information. Fast volumetric imaging that can provide a full spatiotemporal view of intrinsic 3D targets is desirable for interpreting internal organ dynamics. However, existing 1D ultrasound transducer arrays provide 2D images, making it challenging to overcome the trade-off between the temporal resolution and volumetric coverage. In addition, the high driving voltage limits their implementation in wearable settings. With the use of microelectromechanical system (MEMS) technology, we report an ultrasonic phased-array transducer, i.e., a 2D piezoelectric micromachined ultrasound transducer (pMUT) array, which is driven by a low voltage and is chip-compatible for fast 3D volumetric imaging. By grouping multiple pMUT cells into one single drive channel/element, we propose an innovative cell–element–array design and operation of a pMUT array that can be used to quantitatively characterize the key coupling effects between each pMUT cell, allowing 3D imaging with 5-V actuation. The pMUT array demonstrates fast volumetric imaging covering a range of 40 mm × 40 mm × 70 mm in wire phantom and vascular phantom experiments, achieving a high temporal frame rate of 11 kHz. The proposed solution offers a full volumetric view of deep-tissue disorders in a fast manner, paving the way for long-term wearable imaging technology for various organs in deep tissues.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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