二维半导体晶圆级集成的通用光电成像平台

Chip Pub Date : 2024-08-08 DOI:10.1016/j.chip.2024.100107
Xinyu Wang, Die Wang, Yuchen Tian, Jing Guo, Jinshui Miao, Weida Hu, Hailu Wang, Kang Liu, Lei Shao, Saifei Gou, Xiangqi Dong, Hesheng Su, Chuming Sheng, Yuxuan Zhu, Zhejia Zhang, Jinshu Zhang, Qicheng Sun, Zihan Xu, Peng Zhou, Honglei Chen, Wenzhong Bao
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引用次数: 0

摘要

光电探测器(PD)在现代社会中至关重要,因为它们能够检测各种光信号。随着光电探测器发展的指数级增长,各种材料被用来制造各种光电探测器,它们在实现各种应用和技术方面发挥着至关重要的作用。由于缺乏能将所有类型的光导二极管与硅基读出集成电路(ROIC)集成在一起的通用系统,图像传感器技术一直受到阻碍。为了解决这个问题,我们以二维材料为例进行了实验。我们制造了基于 MoS/MoTe 的高性能 PD,并确定了最适合与之配对的 ROIC。这为图像传感器领域的进一步研究奠定了坚实的基础。我们开发并实施了一种多功能测试系统,该系统使用印刷电路板连接 PD 和 ROIC。ROIC 生成采样信号后,通过算法对其进行采集和处理,从而克服器件均匀性的限制,生成肉眼可见的高质量图像。这种通用系统可与多种不同材料制成的 PD 和 ROIC 配合使用,为各种测试应用和不同图像传感器类型的开发提供了极大的便利。这一强大的新平台有望推动这一快速发展领域的进一步创新和进步。
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A universal optoelectronic imaging platform with wafer-scale integration of two-dimensional semiconductors
Photodetectors (PDs) are crucial in modern society as they enable the detection of a diverse range of light-based signals. With the exponential increase in their development, materials are being used to create a wide range of PDs that play critical roles in enabling various applications and technologies. Image sensor technology has been hindered due to the lack of a universal system that can integrate all types of PDs with silicon-based readout integrated circuits (ROICs). To address this issue, we conducted experiments using two-dimensional materials as an example. We fabricated high-performance MoS-/MoTe-based PDs and identified the most suitable ROICs to pair with them. This established a solid foundation for further research in the field of image sensors. We developed and implemented a versatile testing system that uses a printed circuit board to connect the PD and ROIC. After the ROIC generates the sampled signal, it is collected and processed by algorithms, which overcome device uniformity limitations and produce a high-quality image that is visible to the naked eye. This universal system can be used with a wide range of PD and ROIC types made from different materials, making it highly convenient for diverse testing applications and the development of diverse image sensor types. This robust new platform is expected to spur further innovation and advancements in this rapidly developing field.
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A universal optoelectronic imaging platform with wafer-scale integration of two-dimensional semiconductors Wafer-scale synthesis of two-dimensional materials for integrated electronics
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