利用化学气相沉积技术在 SiO$_2$ 基底上可控地生长大面积双层 MoS$_2$ 薄膜

Umakanta Patra, Faiha Mujeeb, Abhiram K, Jai Israni, Subhabrata Dhar
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摘要

双层(2L)过渡金属二掺杂化合物(TMD)具有承载层间激子的能力,其中电子和空穴部分在空间上是分离的,因此与直接激子相比,其寿命要长得多。这种特性可用于开发基于激子的逻辑器件,与电子器件相比,这种器件被认为在能效和光通信兼容性方面更胜一筹。然而,要获得大面积覆盖的均匀厚双层外延薄膜是一项挑战。在这里,我们设计了前驱体在基底表面的流动模式,通过化学气相沉积(CVD)技术在 SiO$_2$ 上获得了大面积(mm2)覆盖的严格双层 MoS$_2$ 薄膜,而无需在生长前对基底进行任何等离子处理。拉曼、低频拉曼、原子力显微镜(AFM)和光致发光(PL)研究证实了这些薄膜的双层性质。薄膜的均匀性通过拉曼峰分离和光致发光强度图进行了检验。高分辨率透射电子显微镜(HRTEM)显示,结晶和扭曲的薄膜层岛共存于薄膜层中。在双层膜上制造的背栅场效应晶体管(FET)结构显示出 10^6 的导通/关断比和 2.5 V/Decade 的次阈值波动(SS)。
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Controlled Growth of large area bilayer MoS$_2$ films on SiO$_2$ substrates by chemical vapour deposition technique
Bilayer (2L) transition metal dichalcogenides (TMD) have the ability to host interlayer excitons, where electron and hole parts are spatially separated that leads to much longer lifetime as compared to direct excitons. This property can be utilized for the development of exciton-based logic devices, which are supposed to be superior in terms of energy efficiency and optical communication compatibility as compared to their electronic counterparts. However, obtaining uniformly thick bilayer epitaxial films with large area coverage is challenging. Here, we have engineered the flow pattern of the precursors over the substrate surface to obtain large area (mm2) covered strictly bilayer MoS$_2$ films on SiO$_2$ by chemical vapour deposition (CVD) technique without any plasma treatment of the substrate prior to the growth. Bilayer nature of these films is confirmed by Raman, low-frequency Raman, atomic force microscopy (AFM) and photoluminescence (PL) studies. The uniformity of the film has been checked by Raman peak separation and PL intensity map. High resolution transmission electron microscopy (HRTEM) reveals that crystalline and twisted bilayer islands coexist within the layer. Back gated field-effect transistor (FET) structures fabricated on the bilayers show on/off ratio of 10^6 and subthreshold swings (SS) of 2.5 V/Decade.
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