{"title":"基于二硫化钼/纤维素纳米晶薄膜的 QCM 湿度传感器的简便制造方法","authors":"Jianwen Song;Lei Liang;Xiao Yong;Xinpeng Chen;Shibu Zhu;Zuquan Wu","doi":"10.1109/TED.2024.3446744","DOIUrl":null,"url":null,"abstract":"In this article, molybdenum disulfide (MoS\n<sub>2</sub>\n)/cellulose nanocrystal (CNC) nanocomposites are coated on silver electrodes of the quartz crystal microbalance (QCM) by the drop-coating method for humidity sensing. The performance of QCM humidity sensors of MoS\n<sub>2</sub>\n, CNC, and MoS\n<sub>2</sub>\n/CNC thin films is investigated in the relative humidity (RH) range of 11.31%–97.59%. The experimental results reveal that MoS\n<sub>2</sub>\n/CNC humidity sensor has high sensitivity (ca. 36.03 Hz/%RH), which is higher than CNC (ca. 1.25 times) and MoS\n<sub>2</sub>\n (ca. 2.5 times). Meanwhile, the sensor has excellent repeatability, high stability, and low humidity hysteresis (ca. 3.3%RH). Moreover, the Langmuir isotherm adsorption model is also used to investigate the humidity-sensitive mechanism of MoS\n<sub>2</sub>\n/CNC humidity sensors. In addition, MoS\n<sub>2</sub>\n/CNC humidity sensor can be well applicable for respiration monitoring which has good application prospect.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":null,"pages":null},"PeriodicalIF":2.9000,"publicationDate":"2024-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Facile Approach to Fabricate QCM Humidity Sensor Based on Molybdenum Disulfide/Cellulose Nanocrystal Thin Film\",\"authors\":\"Jianwen Song;Lei Liang;Xiao Yong;Xinpeng Chen;Shibu Zhu;Zuquan Wu\",\"doi\":\"10.1109/TED.2024.3446744\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this article, molybdenum disulfide (MoS\\n<sub>2</sub>\\n)/cellulose nanocrystal (CNC) nanocomposites are coated on silver electrodes of the quartz crystal microbalance (QCM) by the drop-coating method for humidity sensing. The performance of QCM humidity sensors of MoS\\n<sub>2</sub>\\n, CNC, and MoS\\n<sub>2</sub>\\n/CNC thin films is investigated in the relative humidity (RH) range of 11.31%–97.59%. The experimental results reveal that MoS\\n<sub>2</sub>\\n/CNC humidity sensor has high sensitivity (ca. 36.03 Hz/%RH), which is higher than CNC (ca. 1.25 times) and MoS\\n<sub>2</sub>\\n (ca. 2.5 times). Meanwhile, the sensor has excellent repeatability, high stability, and low humidity hysteresis (ca. 3.3%RH). Moreover, the Langmuir isotherm adsorption model is also used to investigate the humidity-sensitive mechanism of MoS\\n<sub>2</sub>\\n/CNC humidity sensors. In addition, MoS\\n<sub>2</sub>\\n/CNC humidity sensor can be well applicable for respiration monitoring which has good application prospect.\",\"PeriodicalId\":13092,\"journal\":{\"name\":\"IEEE Transactions on Electron Devices\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2024-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Electron Devices\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10648956/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10648956/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A Facile Approach to Fabricate QCM Humidity Sensor Based on Molybdenum Disulfide/Cellulose Nanocrystal Thin Film
In this article, molybdenum disulfide (MoS
2
)/cellulose nanocrystal (CNC) nanocomposites are coated on silver electrodes of the quartz crystal microbalance (QCM) by the drop-coating method for humidity sensing. The performance of QCM humidity sensors of MoS
2
, CNC, and MoS
2
/CNC thin films is investigated in the relative humidity (RH) range of 11.31%–97.59%. The experimental results reveal that MoS
2
/CNC humidity sensor has high sensitivity (ca. 36.03 Hz/%RH), which is higher than CNC (ca. 1.25 times) and MoS
2
(ca. 2.5 times). Meanwhile, the sensor has excellent repeatability, high stability, and low humidity hysteresis (ca. 3.3%RH). Moreover, the Langmuir isotherm adsorption model is also used to investigate the humidity-sensitive mechanism of MoS
2
/CNC humidity sensors. In addition, MoS
2
/CNC humidity sensor can be well applicable for respiration monitoring which has good application prospect.
期刊介绍：
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.
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