{"title":"使用纯钙靶的直流磁控管放电","authors":"M. V. Shandrikov, E. M. Oks, A. A. Cherkasov","doi":"10.1007/s11182-024-03241-x","DOIUrl":null,"url":null,"abstract":"<p>The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.</p>","PeriodicalId":770,"journal":{"name":"Russian Physics Journal","volume":"67 8","pages":"1266 - 1270"},"PeriodicalIF":0.4000,"publicationDate":"2024-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"DC Magnetron Discharge with Pure Calcium Target\",\"authors\":\"M. V. Shandrikov, E. M. Oks, A. A. Cherkasov\",\"doi\":\"10.1007/s11182-024-03241-x\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.</p>\",\"PeriodicalId\":770,\"journal\":{\"name\":\"Russian Physics Journal\",\"volume\":\"67 8\",\"pages\":\"1266 - 1270\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2024-08-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Russian Physics Journal\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11182-024-03241-x\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Russian Physics Journal","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s11182-024-03241-x","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.
期刊介绍：
Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.
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