利用与 CMOS 兼容的局部准分子激光退火技术的多晶硅调制器

IF 4.8 1区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Lightwave Technology Pub Date : 2024-08-29 DOI:10.1109/JLT.2024.3451963

Kunhao Lei;Lichun Wang;Bo Tang;Maoliang Wei;Kangjian Bao;Zequn Chen;Yuting Ye;Boshu Sun;Jialing Jian;Lan Li;Junying Li;Hongtao Lin

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引用次数: 0

摘要

在本文中，我们证明了在保持本征波导完整性的同时，通过对有源区域进行局域准激光退火，可以提高掺杂硅调制器的响应速度。激光退火后的赛道调制器消光比接近17 dB，上升/下降时间为0.82/6.87 μs，相移功率为27.2 mW。利用低温沉积多晶硅调制器结合局部准分子激光退火方案，促进了三维光电芯片的单片集成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Polysilicon Modulator Utilizing CMOS-Compatible Local Excimer Laser Annealing Technology

In this paper, we demonstrated the improvement of response speed of doped-silicon modulators by localized excimer-laser annealing of the active region while preserving the integrity of the intrinsic waveguide. The racetrack modulator after laser annealing exhibits an extinction ratio of nearly 17 dB with a rising /falling time of 0.82/6.87 μs and a π phase shift power Pπ of 27.2 mW. The utilization of a low-temperature deposited polysilicon modulator combined with a localized excimer laser annealing scheme facilitates the monolithic integration of 3D optoelectronic chips.

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来源期刊

Journal of Lightwave Technology 工程技术-工程：电子与电气

CiteScore

9.40

自引率

14.90%

发文量

936

审稿时长

3.9 months

期刊介绍： The Journal of Lightwave Technology is comprised of original contributions, both regular papers and letters, covering work in all aspects of optical guided-wave science, technology, and engineering. Manuscripts are solicited which report original theoretical and/or experimental results which advance the technological base of guided-wave technology. Tutorial and review papers are by invitation only. Topics of interest include the following: fiber and cable technologies, active and passive guided-wave componentry (light sources, detectors, repeaters, switches, fiber sensors, etc.); integrated optics and optoelectronics; and systems, subsystems, new applications and unique field trials. System oriented manuscripts should be concerned with systems which perform a function not previously available, out-perform previously established systems, or represent enhancements in the state of the art in general.