{"title":"基于碳化硅 npn 结构的具有内部增益的 X 射线探测器","authors":"Jing Wang;Liang Chen;Song Bai;Leidang Zhou;Fangbao Wang;Silong Zhang;Tingting Fan;Runhua Huang;Shaohua Yang;Geng Tian;Xiaoping Ouyang","doi":"10.1109/LED.2024.3451623","DOIUrl":null,"url":null,"abstract":"A two-terminal npn device based on 4H-SiC has been employed as a radiation detector for the first time. This device was designed as a vertical npn structure with a sensitive area of up to 1 cm2, and the thickness of the sensitive layer was about \n<inline-formula> <tex-math>$30~\\mu $ </tex-math></inline-formula>\nm. The detector exhibited a low dark current of \n<inline-formula> <tex-math>$\\sim ~0.12$ </tex-math></inline-formula>\n nA\n<inline-formula> <tex-math>$\\cdot $ </tex-math></inline-formula>\ncm\n<inline-formula> <tex-math>$^{-{2}}$ </tex-math></inline-formula>\n with a fully depleted sensitive region at 200 V. The sensitivity of unit area of the detector achieved \n<inline-formula> <tex-math>$36.67~\\mu $ </tex-math></inline-formula>\nC\n<inline-formula> <tex-math>$\\cdot $ </tex-math></inline-formula>\nGy\n<inline-formula> <tex-math>$^{-{1}} \\cdot $ </tex-math></inline-formula>\ncm\n<inline-formula> <tex-math>$^{-{2}}$ </tex-math></inline-formula>\n (\n<inline-formula> <tex-math>$28.09~\\mu $ </tex-math></inline-formula>\nA @ 0.766 Gy/s) to X-ray illumination (generated by bremsstrahlung with a tungsten target with tube voltage 30 kV) at 200 V, which was attributed to the amplification mechanism of the npn structure. Compared with the response characteristics of a SiC-PiN detector with the same sensitive volume, the gain of the two-terminal SiC npn detector was estimated to be 11.46 at 200 V. Specifically, the internal gain of the detector increased with the X-ray dose rate, where the X-ray photocurrent worked as the base current in the BJT devices. The internal gain also increased with the bias voltage due to the Early effect. Moreover, the two-terminal SiC npn detectors had a good switching response to X-rays and showed great potential in the applications of radiation detection.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"45 11","pages":"2142-2145"},"PeriodicalIF":4.1000,"publicationDate":"2024-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"X-Ray Detector With Internal Gain Based on a SiC npn Structure\",\"authors\":\"Jing Wang;Liang Chen;Song Bai;Leidang Zhou;Fangbao Wang;Silong Zhang;Tingting Fan;Runhua Huang;Shaohua Yang;Geng Tian;Xiaoping Ouyang\",\"doi\":\"10.1109/LED.2024.3451623\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A two-terminal npn device based on 4H-SiC has been employed as a radiation detector for the first time. This device was designed as a vertical npn structure with a sensitive area of up to 1 cm2, and the thickness of the sensitive layer was about \\n<inline-formula> <tex-math>$30~\\\\mu $ </tex-math></inline-formula>\\nm. The detector exhibited a low dark current of \\n<inline-formula> <tex-math>$\\\\sim ~0.12$ </tex-math></inline-formula>\\n nA\\n<inline-formula> <tex-math>$\\\\cdot $ </tex-math></inline-formula>\\ncm\\n<inline-formula> <tex-math>$^{-{2}}$ </tex-math></inline-formula>\\n with a fully depleted sensitive region at 200 V. The sensitivity of unit area of the detector achieved \\n<inline-formula> <tex-math>$36.67~\\\\mu $ </tex-math></inline-formula>\\nC\\n<inline-formula> <tex-math>$\\\\cdot $ </tex-math></inline-formula>\\nGy\\n<inline-formula> <tex-math>$^{-{1}} \\\\cdot $ </tex-math></inline-formula>\\ncm\\n<inline-formula> <tex-math>$^{-{2}}$ </tex-math></inline-formula>\\n (\\n<inline-formula> <tex-math>$28.09~\\\\mu $ </tex-math></inline-formula>\\nA @ 0.766 Gy/s) to X-ray illumination (generated by bremsstrahlung with a tungsten target with tube voltage 30 kV) at 200 V, which was attributed to the amplification mechanism of the npn structure. Compared with the response characteristics of a SiC-PiN detector with the same sensitive volume, the gain of the two-terminal SiC npn detector was estimated to be 11.46 at 200 V. Specifically, the internal gain of the detector increased with the X-ray dose rate, where the X-ray photocurrent worked as the base current in the BJT devices. The internal gain also increased with the bias voltage due to the Early effect. Moreover, the two-terminal SiC npn detectors had a good switching response to X-rays and showed great potential in the applications of radiation detection.\",\"PeriodicalId\":13198,\"journal\":{\"name\":\"IEEE Electron Device Letters\",\"volume\":\"45 11\",\"pages\":\"2142-2145\"},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-08-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Electron Device Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10659085/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10659085/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
基于 4H-SiC 的双端 npn 器件首次被用作辐射探测器。该器件设计为垂直 npn 结构,灵敏区面积达 1 cm2,灵敏层厚度约为 $30~\mu$m。\cdot $ cm $^{-{2}}$ ( $28.09~\mu $ A @ 0.766 Gy/s) ,这归功于 npn 结构的放大机制。与具有相同灵敏体积的 SiC-PiN 检测器的响应特性相比,在 200 V 电压下,双端 SiC npn 检测器的增益估计为 11.46。具体而言,检测器的内部增益随 X 射线剂量率的增加而增加,其中 X 射线光电流在 BJT 器件中起基极电流的作用。由于厄尔效应,内部增益也随偏置电压的增加而增加。此外,双端 SiC npn 探测器对 X 射线具有良好的开关响应,在辐射探测应用中显示出巨大的潜力。
X-Ray Detector With Internal Gain Based on a SiC npn Structure
A two-terminal npn device based on 4H-SiC has been employed as a radiation detector for the first time. This device was designed as a vertical npn structure with a sensitive area of up to 1 cm2, and the thickness of the sensitive layer was about
$30~\mu $
m. The detector exhibited a low dark current of
$\sim ~0.12$
nA
$\cdot $
cm
$^{-{2}}$
with a fully depleted sensitive region at 200 V. The sensitivity of unit area of the detector achieved
$36.67~\mu $
C
$\cdot $
Gy
$^{-{1}} \cdot $
cm
$^{-{2}}$
(
$28.09~\mu $
A @ 0.766 Gy/s) to X-ray illumination (generated by bremsstrahlung with a tungsten target with tube voltage 30 kV) at 200 V, which was attributed to the amplification mechanism of the npn structure. Compared with the response characteristics of a SiC-PiN detector with the same sensitive volume, the gain of the two-terminal SiC npn detector was estimated to be 11.46 at 200 V. Specifically, the internal gain of the detector increased with the X-ray dose rate, where the X-ray photocurrent worked as the base current in the BJT devices. The internal gain also increased with the bias voltage due to the Early effect. Moreover, the two-terminal SiC npn detectors had a good switching response to X-rays and showed great potential in the applications of radiation detection.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.