Yonglong Pu;Huabin Yang;Meng Shi;Qirui Zhang;Na Zhou;Chengjun Huang;Haiyang Mao
{"title":"具有铝装饰纳米森林的 MEMS 热电堆，可进行宽带紫外线探测","authors":"Yonglong Pu;Huabin Yang;Meng Shi;Qirui Zhang;Na Zhou;Chengjun Huang;Haiyang Mao","doi":"10.1109/LED.2024.3453291","DOIUrl":null,"url":null,"abstract":"This work presents a MEMS thermopile integrated with Al nanoparticle-decorated nanoforests (Al@NFs), fabricated using a CMOS compatible process. Due to the light trapping effect and the localized surface plasmon resonance effect introduced by the Al@NFs, ultraviolet (UV) optical energy can be effectively absorbed and converted into heat energy. As a result, a broad UV detection range of the device is achieved. Compared with the pristine thermopile without such Al@NFs, the voltage response of the device is improved by 2.0 to 16.2 times within a wavelength range of 240–400 nm. With such a superiority, the as-prepared device is capable of UV detection for practical applications, including the quality discrimination of different sunscreens under UV radiation.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2024-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A MEMS Thermopile With Al Decorated Nanoforests Capable of Broadband UV Detection\",\"authors\":\"Yonglong Pu;Huabin Yang;Meng Shi;Qirui Zhang;Na Zhou;Chengjun Huang;Haiyang Mao\",\"doi\":\"10.1109/LED.2024.3453291\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents a MEMS thermopile integrated with Al nanoparticle-decorated nanoforests (Al@NFs), fabricated using a CMOS compatible process. Due to the light trapping effect and the localized surface plasmon resonance effect introduced by the Al@NFs, ultraviolet (UV) optical energy can be effectively absorbed and converted into heat energy. As a result, a broad UV detection range of the device is achieved. Compared with the pristine thermopile without such Al@NFs, the voltage response of the device is improved by 2.0 to 16.2 times within a wavelength range of 240–400 nm. With such a superiority, the as-prepared device is capable of UV detection for practical applications, including the quality discrimination of different sunscreens under UV radiation.\",\"PeriodicalId\":13198,\"journal\":{\"name\":\"IEEE Electron Device Letters\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-09-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Electron Device Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10663347/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10663347/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A MEMS Thermopile With Al Decorated Nanoforests Capable of Broadband UV Detection
This work presents a MEMS thermopile integrated with Al nanoparticle-decorated nanoforests (Al@NFs), fabricated using a CMOS compatible process. Due to the light trapping effect and the localized surface plasmon resonance effect introduced by the Al@NFs, ultraviolet (UV) optical energy can be effectively absorbed and converted into heat energy. As a result, a broad UV detection range of the device is achieved. Compared with the pristine thermopile without such Al@NFs, the voltage response of the device is improved by 2.0 to 16.2 times within a wavelength range of 240–400 nm. With such a superiority, the as-prepared device is capable of UV detection for practical applications, including the quality discrimination of different sunscreens under UV radiation.
期刊介绍：
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.
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