集成了湿敏 MIL-96(Al)薄膜的温度自补偿双芯光纤传感器,用于呼吸检测

IF 5.2 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY Measurement Pub Date : 2024-09-14 DOI:10.1016/j.measurement.2024.115690
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引用次数: 0

摘要

本文提出了一种用于动态监测温度和湿度的双芯光纤传感器。将侧纤芯打磨成 D 型光纤,并沉积一层纳米银薄膜和一层聚二甲基硅氧烷(PDMS),以构建表面等离子体共振(SPR)温度补偿器。中间的纤芯被构建为长周期光纤光栅(LPFG)传感通道。LPFG 的模式转换是通过 TiO2 薄膜实现的,其折射率(RI)灵敏度提高了约 4 倍。同时,在 TiO2 薄膜外还生长了一层湿敏 MIL-96(Al)薄膜。由于 MIL-96(Al)薄膜对水分子具有特殊的孔隙结构,因此可以通过吸收水分子来改变其有效折射率。研究表明,LPFG 传感器的相对湿度灵敏度可达 -0.411 nm/%RH。最后,该传感器成功实现了对呼吸频率的实时动态监测。
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Temperature self-compensated dual core fiber-optic sensor integrated with moisture sensitive MIL-96(Al) film for breath detection

In this paper, a dual-core fiber optic sensor has been proposed for dynamic monitoring of temperature and humidity. The side core is polished into a D-type optical fiber, and a layer of nano-silver film and a layer of polydimethylsiloxane (PDMS) are deposited to construct a surface plasmon resonance (SPR) temperature compensator. The middle core is constructed as the long-period fiber grating (LPFG) sensing channel. The mode conversion of LPFG is achieved by TiO2 film, and its refractive index (RI) sensitivity is increased by about 4 times. Meanwhile, a layer of moisture sensitive MIL-96(Al) film is grown outside the TiO2 film. Due to the particular pore structure for water molecules, it is possible to change the effective RI of MIL-96(Al) film by absorbing water molecules. Research has shown that the LPFG sensor can achieve a relative humidity sensitivity of −0.411 nm/%RH. Finally, the sensor successfully achieved real-time dynamic monitoring of respiratory rate.

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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
期刊最新文献
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