{"title":"金属多层膜中混溶界面的衍射和微观结构研究","authors":"","doi":"10.1016/j.matchar.2024.114362","DOIUrl":null,"url":null,"abstract":"<div><p>The structural characterization of two-metal phase systems at nanometer scale which present partial or total mixing, is extremely challenging. In the present work, a model to reproduce the x-ray diffraction patterns of multilayers composed by two miscible metals, Mo and W, is presented. Two different deposition conditions were used to obtain different stress states (compressive and tensile). From the proposed model, the contribution of each metal phase was discerned, the intra layer disorder and the level of mixing at the interface were quantified. The comparison between structures deposited sequentially, with others obtained by co-evaporation is also carried out to better understand the details of the interdiffusion and to separate them from the effects of roughness and elastic adaptation stresses. Microstructure characterization by scanning and transmission electron microscopy was compared and discussed with the diffraction analysis.</p></div>","PeriodicalId":18727,"journal":{"name":"Materials Characterization","volume":null,"pages":null},"PeriodicalIF":4.8000,"publicationDate":"2024-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S1044580324007435/pdfft?md5=2108fc53686eff2fb79ac78b8280bb09&pid=1-s2.0-S1044580324007435-main.pdf","citationCount":"0","resultStr":"{\"title\":\"Diffraction and microstructure study of miscible interfaces in metallic multilayers\",\"authors\":\"\",\"doi\":\"10.1016/j.matchar.2024.114362\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The structural characterization of two-metal phase systems at nanometer scale which present partial or total mixing, is extremely challenging. In the present work, a model to reproduce the x-ray diffraction patterns of multilayers composed by two miscible metals, Mo and W, is presented. Two different deposition conditions were used to obtain different stress states (compressive and tensile). From the proposed model, the contribution of each metal phase was discerned, the intra layer disorder and the level of mixing at the interface were quantified. The comparison between structures deposited sequentially, with others obtained by co-evaporation is also carried out to better understand the details of the interdiffusion and to separate them from the effects of roughness and elastic adaptation stresses. Microstructure characterization by scanning and transmission electron microscopy was compared and discussed with the diffraction analysis.</p></div>\",\"PeriodicalId\":18727,\"journal\":{\"name\":\"Materials Characterization\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.8000,\"publicationDate\":\"2024-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S1044580324007435/pdfft?md5=2108fc53686eff2fb79ac78b8280bb09&pid=1-s2.0-S1044580324007435-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Characterization\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1044580324007435\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, CHARACTERIZATION & TESTING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Characterization","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1044580324007435","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CHARACTERIZATION & TESTING","Score":null,"Total":0}
引用次数: 0
摘要
纳米尺度的双金属相体系存在部分或完全混合的现象,对其进行结构表征极具挑战性。本研究提出了一个模型,用于再现由 Mo 和 W 两种混溶金属组成的多层膜的 X 射线衍射图样。使用两种不同的沉积条件来获得不同的应力状态(压缩和拉伸)。根据所提出的模型,对每种金属相的贡献、层内无序性和界面混合程度进行了量化。为了更好地理解相互扩散的细节,并将其与粗糙度和弹性适应应力的影响区分开来,还对顺序沉积的结构和通过共蒸发获得的其他结构进行了比较。通过扫描和透射电子显微镜进行的微观结构表征与衍射分析进行了比较和讨论。
Diffraction and microstructure study of miscible interfaces in metallic multilayers
The structural characterization of two-metal phase systems at nanometer scale which present partial or total mixing, is extremely challenging. In the present work, a model to reproduce the x-ray diffraction patterns of multilayers composed by two miscible metals, Mo and W, is presented. Two different deposition conditions were used to obtain different stress states (compressive and tensile). From the proposed model, the contribution of each metal phase was discerned, the intra layer disorder and the level of mixing at the interface were quantified. The comparison between structures deposited sequentially, with others obtained by co-evaporation is also carried out to better understand the details of the interdiffusion and to separate them from the effects of roughness and elastic adaptation stresses. Microstructure characterization by scanning and transmission electron microscopy was compared and discussed with the diffraction analysis.
期刊介绍:
Materials Characterization features original articles and state-of-the-art reviews on theoretical and practical aspects of the structure and behaviour of materials.
The Journal focuses on all characterization techniques, including all forms of microscopy (light, electron, acoustic, etc.,) and analysis (especially microanalysis and surface analytical techniques). Developments in both this wide range of techniques and their application to the quantification of the microstructure of materials are essential facets of the Journal.
The Journal provides the Materials Scientist/Engineer with up-to-date information on many types of materials with an underlying theme of explaining the behavior of materials using novel approaches. Materials covered by the journal include:
Metals & Alloys
Ceramics
Nanomaterials
Biomedical materials
Optical materials
Composites
Natural Materials.