Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, André Strittmatter, Witlef Wieczorek
{"title":"用于量子光机电的具有高品质因数的纳米机械晶体 AlN 谐振器","authors":"Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, André Strittmatter, Witlef Wieczorek","doi":"10.1002/adma.202403155","DOIUrl":null,"url":null,"abstract":"High-quality factor (<i>Q</i><sub>m</sub>) mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material enables the use of dissipation dilution and strain engineering techniques, which increase the mechanical quality factor. These techniques have been employed for high-<i>Q</i><sub>m</sub> mechanical resonators made from amorphous materials and, recently, from crystalline materials such as InGaP, SiC, and Si. A strained crystalline film exhibiting substantial piezoelectricity expands the capability of high-<i>Q</i><sub>m</sub> nanomechanical resonators to directly utilize electronic degrees of freedom. In this work, nanomechanical resonators with <i>Q</i><sub>m</sub> up to 2.9 × 10<sup>7</sup> made from tensile-strained 290 nm-thick AlN are realized. AlN is an epitaxially-grown crystalline material offering strong piezoelectricity. Nanomechanical resonators that exploit dissipation dilution and strain engineering to reach a <i>Q</i><sub>m</sub> × <i>f</i><sub>m</sub>-product approaching 10<sup>13</sup> Hz at room temperature are demonstrated. A novel resonator geometry is realized, triangline, whose shape follows the Al–N bonds and offers a central pad patterned with a photonic crystal. This allows to reach an optical reflectivity above 80% for efficient coupling to out-of-plane light. The presented results pave the way for quantum optoelectromechanical devices at room temperature based on tensile-strained AlN.","PeriodicalId":114,"journal":{"name":"Advanced Materials","volume":null,"pages":null},"PeriodicalIF":27.4000,"publicationDate":"2024-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanomechanical Crystalline AlN Resonators with High Quality Factors for Quantum Optoelectromechanics\",\"authors\":\"Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, André Strittmatter, Witlef Wieczorek\",\"doi\":\"10.1002/adma.202403155\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High-quality factor (<i>Q</i><sub>m</sub>) mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material enables the use of dissipation dilution and strain engineering techniques, which increase the mechanical quality factor. These techniques have been employed for high-<i>Q</i><sub>m</sub> mechanical resonators made from amorphous materials and, recently, from crystalline materials such as InGaP, SiC, and Si. A strained crystalline film exhibiting substantial piezoelectricity expands the capability of high-<i>Q</i><sub>m</sub> nanomechanical resonators to directly utilize electronic degrees of freedom. In this work, nanomechanical resonators with <i>Q</i><sub>m</sub> up to 2.9 × 10<sup>7</sup> made from tensile-strained 290 nm-thick AlN are realized. AlN is an epitaxially-grown crystalline material offering strong piezoelectricity. Nanomechanical resonators that exploit dissipation dilution and strain engineering to reach a <i>Q</i><sub>m</sub> × <i>f</i><sub>m</sub>-product approaching 10<sup>13</sup> Hz at room temperature are demonstrated. A novel resonator geometry is realized, triangline, whose shape follows the Al–N bonds and offers a central pad patterned with a photonic crystal. This allows to reach an optical reflectivity above 80% for efficient coupling to out-of-plane light. The presented results pave the way for quantum optoelectromechanical devices at room temperature based on tensile-strained AlN.\",\"PeriodicalId\":114,\"journal\":{\"name\":\"Advanced Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":27.4000,\"publicationDate\":\"2024-09-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1002/adma.202403155\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1002/adma.202403155","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
Nanomechanical Crystalline AlN Resonators with High Quality Factors for Quantum Optoelectromechanics
High-quality factor (Qm) mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material enables the use of dissipation dilution and strain engineering techniques, which increase the mechanical quality factor. These techniques have been employed for high-Qm mechanical resonators made from amorphous materials and, recently, from crystalline materials such as InGaP, SiC, and Si. A strained crystalline film exhibiting substantial piezoelectricity expands the capability of high-Qm nanomechanical resonators to directly utilize electronic degrees of freedom. In this work, nanomechanical resonators with Qm up to 2.9 × 107 made from tensile-strained 290 nm-thick AlN are realized. AlN is an epitaxially-grown crystalline material offering strong piezoelectricity. Nanomechanical resonators that exploit dissipation dilution and strain engineering to reach a Qm × fm-product approaching 1013 Hz at room temperature are demonstrated. A novel resonator geometry is realized, triangline, whose shape follows the Al–N bonds and offers a central pad patterned with a photonic crystal. This allows to reach an optical reflectivity above 80% for efficient coupling to out-of-plane light. The presented results pave the way for quantum optoelectromechanical devices at room temperature based on tensile-strained AlN.
期刊介绍:
Advanced Materials, one of the world's most prestigious journals and the foundation of the Advanced portfolio, is the home of choice for best-in-class materials science for more than 30 years. Following this fast-growing and interdisciplinary field, we are considering and publishing the most important discoveries on any and all materials from materials scientists, chemists, physicists, engineers as well as health and life scientists and bringing you the latest results and trends in modern materials-related research every week.