{"title":"激光扫描图案诱导的带有 316L 不锈钢基底的 Ti-V-Hf-Zr 非蒸发获取薄膜的表面特性变化","authors":"","doi":"10.1016/j.vacuum.2024.113639","DOIUrl":null,"url":null,"abstract":"<div><p>The effects of laser treatment scanning patterns on the properties of Ti-V-Hf-Zr non-evaporable getter (NEG) film on 316L stainless steel (316L SS) substrates were analyzed. 316L SS substrates were laser-treated with different patterns, which resulted in spherical structure and protrusions on the surface of the substrates. Subsequently, Ti-V-Hf-Zr NEG films were deposited on ultrasonically cleaned laser-treated 316L SS by a direct current (DC) magnetron sputtering machine. Based on the XPS results of Ti-V-Hf-Zr, it has been revealed that the atomic proportions of film elements on the surface of samples #1-1∼#3–1 were about 2.2 (Ti):1.7 (Zr):0.9 (V):1.0 (Hf). In this paper, the Ar<sup>+</sup>-induced secondary electron yield (SEY) and surface resistivity of Ti-V-Hf-Zr NEG are discussed for the first time, and it has been observed that the laser treatment leads to an increase of the substrate surface roughness, which decreases the SEY and increases the surface resistivity.</p></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":null,"pages":null},"PeriodicalIF":3.8000,"publicationDate":"2024-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser scanning patterns induced surface properties variations of Ti-V-Hf-Zr non-evaporable getter film with 316L stainless steel substrates\",\"authors\":\"\",\"doi\":\"10.1016/j.vacuum.2024.113639\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The effects of laser treatment scanning patterns on the properties of Ti-V-Hf-Zr non-evaporable getter (NEG) film on 316L stainless steel (316L SS) substrates were analyzed. 316L SS substrates were laser-treated with different patterns, which resulted in spherical structure and protrusions on the surface of the substrates. Subsequently, Ti-V-Hf-Zr NEG films were deposited on ultrasonically cleaned laser-treated 316L SS by a direct current (DC) magnetron sputtering machine. Based on the XPS results of Ti-V-Hf-Zr, it has been revealed that the atomic proportions of film elements on the surface of samples #1-1∼#3–1 were about 2.2 (Ti):1.7 (Zr):0.9 (V):1.0 (Hf). In this paper, the Ar<sup>+</sup>-induced secondary electron yield (SEY) and surface resistivity of Ti-V-Hf-Zr NEG are discussed for the first time, and it has been observed that the laser treatment leads to an increase of the substrate surface roughness, which decreases the SEY and increases the surface resistivity.</p></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2024-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X24006857\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X24006857","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Laser scanning patterns induced surface properties variations of Ti-V-Hf-Zr non-evaporable getter film with 316L stainless steel substrates
The effects of laser treatment scanning patterns on the properties of Ti-V-Hf-Zr non-evaporable getter (NEG) film on 316L stainless steel (316L SS) substrates were analyzed. 316L SS substrates were laser-treated with different patterns, which resulted in spherical structure and protrusions on the surface of the substrates. Subsequently, Ti-V-Hf-Zr NEG films were deposited on ultrasonically cleaned laser-treated 316L SS by a direct current (DC) magnetron sputtering machine. Based on the XPS results of Ti-V-Hf-Zr, it has been revealed that the atomic proportions of film elements on the surface of samples #1-1∼#3–1 were about 2.2 (Ti):1.7 (Zr):0.9 (V):1.0 (Hf). In this paper, the Ar+-induced secondary electron yield (SEY) and surface resistivity of Ti-V-Hf-Zr NEG are discussed for the first time, and it has been observed that the laser treatment leads to an increase of the substrate surface roughness, which decreases the SEY and increases the surface resistivity.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.