在蓝宝石晶片上直接生长单层石墨烯电极的晶体管

IF 5.4 3区 材料科学 Q2 CHEMISTRY, PHYSICAL ACS Applied Energy Materials Pub Date : 2024-09-16 DOI:10.1021/acsaelm.4c01208
Zhichao Weng, Robert Wallis, Bryan Wingfield, Paul Evans, Piotr Baginski, Jaspreet Kainth, Andrey E. Nikolaenko, Lok Yi Lee, Joanna Baginska, William P. Gillin, Ivor Guiney, Colin J. Humphreys, Oliver Fenwick
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引用次数: 0

摘要

由于忆阻器具有不易挥发、结构简单和功耗低等特点,它的开发引起了人们的极大兴趣。基于石墨烯的忆阻器具有原子单层厚度、灵活性和均匀性,作为当代场效应晶体管(FET)技术在逻辑和存储设备等应用中的一种有前途的替代技术,它能实现更高的集成密度和更低的功耗,因而备受关注。在忆阻器中使用石墨烯作为电极,还能提高抗降解机制的稳健性,包括氧空位向电极的扩散和不需要的金属离子扩散。然而,要实现这一技术变革,必须建立一种可扩展、稳健且具有成本效益的器件制造工艺。在此,我们报告了利用市售的金属有机化学气相沉积(MOCVD)系统,以可大规模生产、无污染和无转移的方式在蓝宝石晶片上直接生长高质量单层石墨烯的情况。利用这种方法,我们开发出了基于石墨烯电极的忆阻器,并且可以在晶圆规模上完成包含石墨烯电极的器件制造过程中使用的所有工艺。基于石墨烯电极的忆阻器在耐久性、保持力和导通/关断比方面都表现出良好的特性。这项工作为以商业和技术上可持续的方式实现稳健的石墨烯基忆阻器提供了一条可行的途径,为未来实现功能更强大、结构更紧凑的集成石墨烯电子器件铺平了道路。
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Memristors with Monolayer Graphene Electrodes Grown Directly on Sapphire Wafers
The development of the memristor has generated significant interest due to its non-volatility, simple structure, and low power consumption. Memristors based on graphene offer atomic monolayer thickness, flexibility, and uniformity and have attracted attention as a promising alternative to contemporary field-effect transistor (FET) technology in applications such as logic and memory devices, achieving higher integration density and lower power consumption. The use of graphene as electrodes in memristors could also increase robustness against degradation mechanisms, including oxygen vacancy diffusion to the electrode and unwanted metal ion diffusion. However, to realize this technological transformation, it is necessary to establish a scalable, robust, and cost-effective device fabrication process. Here we report the direct growth of high-quality monolayer graphene on sapphire wafers in a mass-producible, contamination-free, and transfer-free manner, using a commercially available metal–organic chemical vapor deposition (MOCVD) system. By taking advantage of this approach, graphene-electrode based memristors are developed, and all the processes used in the device fabrication incorporating graphene electrodes can be performed at wafer scale. The graphene electrode-based memristor demonstrates promising characteristics in terms of endurance, retention, and ON/OFF ratio. This work presents a possible and viable route to achieving robust graphene-based memristors in a commercially and technologically sustainable manner, paving the way for the realization of more powerful and compact integrated graphene electronics in the future.
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来源期刊
ACS Applied Energy Materials
ACS Applied Energy Materials Materials Science-Materials Chemistry
CiteScore
10.30
自引率
6.20%
发文量
1368
期刊介绍: ACS Applied Energy Materials is an interdisciplinary journal publishing original research covering all aspects of materials, engineering, chemistry, physics and biology relevant to energy conversion and storage. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important energy applications.
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