研究 PVD TiAlN 涂层的机械形态结构和电化学性能:详细实验及其与使用最小二乘法的分析方法的相关性

IF 7.5 Q1 CHEMISTRY, PHYSICAL Applied Surface Science Advances Pub Date : 2024-09-20 DOI:10.1016/j.apsadv.2024.100638
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引用次数: 0

摘要

在这项实验研究中,采用了物理气相沉积(PVD)工艺在硅基底上沉积 TiAlN 涂层。氮气流速、偏置电压和基底到目标的距离被选为输入参数,每个参数有三个不同的水平。这些输入参数的设计采用田口 L9 正交阵列(OA)结构。沉积后,对 TiAlN 涂层的机械、微观结构、结构和电化学特性进行了细致的表征和分析,以确定所选参数对其各种特性的影响。微观结构分析表明,整个薄膜具有均匀的结构。此外,在特定参数下,薄膜的机械性能也表现出显著的性能。然而,观察发现,在应用参数的不同特性之间并没有发现一致的趋势。为了阐明这些变量之间的复杂关系,我们采用了最小二乘法(LSM)回归分析技术。这种分析方法有助于建立不同参数之间的相关性,从而加深理解这些参数对 TiAlN 涂层性能的共同影响。对分析结果的理解将有助于预测两个极值之间的数值,从而在没有实验结果的情况下测量性能参数。
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Investigation of mechanical morphological structural and electrochemical properties of PVD TiAlN coating: A detail experimental and its correlation with an analytical approach using the least square method

In this experimental investigation, a Physical Vapor Deposition (PVD) process was employed to deposit TiAlN coating onto a Si substrate. The nitrogen flow rate, bias voltage, and substrate-to-target distance were selected as input parameters, each with three different levels. The design of these input parameters was structured according to Taguchi's L9 Orthogonal Array (OA). Following deposition, the mechanical, microstructural, structural, and electrochemical properties of the TiAlN coating were meticulously characterized and analyzed to discern the influence of the selected parameters on its various properties. Microstructural analysis revealed a homogeneous structure throughout the film. Additionally, the mechanical properties of the film exhibited notable performance under the specified parameters. However, it was observed that no consistent trend could be identified across different properties concerning the applied parameters. To elucidate the complex relationships among these variables, the Least Squares Method (LSM) regression analysis technique was employed. This analytical approach facilitated the establishment of correlations among the diverse parameters, enhancing the understanding of their collective impact on the TiAlN coating properties. The understanding of analytical results will be useful for predicting the values between the two extremities to measure the performance parameters where the experimental results are not available.

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CiteScore
8.10
自引率
1.60%
发文量
128
审稿时长
66 days
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