通过高信噪比 MEMS 麦克风评估半透明纳米纤维网。

Hutomo Suryo Wasisto, Sebastian Anzinger, Giovanni Acanfora, Aloysius Farrel, Valentina Sabatini, Elisa Grimoldi, Vasco Marelli, Nikita Ovsiannikov, Konstantin Tkachuk, Giordano Tosolini, Carmine Lucignano, Marco Mietta, Guangzhao Zhang, Marc Fueldner, Erwin Peiner
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摘要

基于微机电系统的麦克风在恶劣环境中使用时,需要很高的侵入防护等级。在此,我们开发了由聚酰亚胺纳米纤维和聚醚醚酮织物网组成的环境防护部件,并随后通过工业标准表征和理论模拟评估了它们对基于微机电系统的高信噪比麦克风的电声特性的影响。内径为 1.4 mm 的纳米纤维网模切部件直接置于麦克风声端口的顶部,在电声测量中产生的信噪比和插入损耗分别为 (2.05 ± 0.16) dB(A) 和 (0.30 ± 0.11) dBFS。因此,网状保护传声器系统可以保持 (70.05 ± 0.17) dB(A) 的高信噪比值。由于这些纳米纤维网具有高温稳定性、声学性能、环境鲁棒性和工业规模的批量生产,因此很有可能在基于封装微机电系统的麦克风的大批量市场应用中得到实际应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Acoustically semitransparent nanofibrous meshes appraised by high signal-to-noise-ratio MEMS microphones
Microelectromechanical system-based microphones demand high ingress protection levels with regard to their use in harsh environment. Here, we develop environmental protective components comprising polyimide nanofibers combined onto polyether ether ketone fabric meshes and subsequently appraise their impact on the electroacoustic properties of high signal-to-noise-ratio microelectromechanical system-based microphones via industry-standard characterizations and theoretical simulations. Being placed directly on top of the microphone sound port, the nanofiber mesh die-cut parts with an inner diameter of 1.4 mm result in signal-to-noise-ratio and insertion losses of (2.05 ± 0.16) dB(A) and (0.30 ± 0.11) dBFS, respectively, in electroacoustic measurements. Hence, a high signal-to-noise-ratio value of (70.05 ± 0.17) dB(A) can be maintained by the mesh-protected microphone system. Due to their high temperature stability, acoustic performance, environmental robustness, and industry-scale batch production, these nanofibrous meshes reveal high potential to be practically implemented in high-market-volume applications of packaged microelectromechanical system-based microphones. Hutomo Suryo Wasisto and colleagues develop a nanofiber-based mesh for improving the ingress protection level of microelectromechanical system (MEMS)-based microphone. Their device demonstrates high acoustic performance and environmental robustness.
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