A Low Phase Jitter MEMS Oscillator with Centrally-Anchored Piezoelectric Resonator for Wide Temperature Range Real Time Clock Applications.

This paper describes prototype temperature compensated piezoelectric MEMS oscillators operating in the wide temperature range of -40 °C to 85 °C for RTC applications. The AlN-on-Si resonator is centrally anchored at one point and designed for low power operation with a wide frequency tuning range of 5000 ppm. The oscillators exhibit a stable sinusoidal output at about 497 kHz frequency for time keeping applications with an integrated phase jitter being 10× better than the best commercially available MEMS RTC oscillators for supplementary use in portable devices for clocking audio circuits. The measured oscillator performance remains relatively unchanged when comparing the wafer level packaged capped MEMS resonator with the uncapped one, showing great potential for a high performance low-power RTC oscillator.