Piezoceramic Actuation for Precision Enhancement in a Multistage Industrial Motion System

In this letter, a multistage design that is the result of integrating a uni-axial fine positioning piezo-actuated stage and an existing precision motion system is taken into consideration, with the fine stage being predicted to improve the overall system's precision. In an effort to account for relevant piezoceramics dynamic behavior and hysteresis, mechanical coupling between the involved stages is taken into consideration when developing the fine stage feedforward controller based on the rate–dependent Prandtl–Ishlinskii model inverse. The required multistage design steps in accordance with the above-suggested technique are described with reference to semiconductor production. The outcomes demonstrate that the suggested piezo-actuated fine stage does enhance the overall motion system's scanning accuracy.