通过 STED 光刻技术制造亚衍射聚合物纳米线的新型羧基-MWCNTs 光刻胶

IF 3.1 3区物理与天体物理 Q2 Engineering Optik Pub Date : 2024-10-05 DOI:10.1016/j.ijleo.2024.172070

Fei Xie , Lili Liang , Qingbin Zhou , Ziwei Feng , Jian Xu , Xiangping Li , Yaoyu Cao

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引用次数: 0

摘要

我们开发了一种新型复合光刻胶，由丙烯酸酯和羧基官能化多壁碳纳米管（MWNTs-COOH）制成，用于利用 STED 启发的光刻技术制造亚衍射尺寸的聚合物纳米线。分散在高交联丙烯酸酯单体中的 MWNTs-COOH 可降低抑制激光功率，从而改善光刻效果。使用 MWNTs-COOH 后，抑制激光功率从 5 mW 降至 3 mW，而可实现的最小特征尺寸从 121 nm 增至 48 nm。这种创新方法为微机电系统（MEMS）和纳米机电系统（NEMS）领域基于亚衍射 MWCNTs/聚合物复合材料的设备开发带来了巨大前景。

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Novel carboxylic-MWCNTs photoresist for fabricating sub-diffraction polymer nanowires via STED lithography

A novel composite photoresist, derived from acrylates and carboxylic-functionalized multi-walled carbon nanotubes (MWNTs-COOH), has been developed for the fabrication of sub-diffraction-sized polymer nanowires using STED-inspired lithography. The MWNTs-COOH dispersed in highly cross-linking acrylate monomers benefits to a reduced inhibition laser power for improving lithography. With the MWNTs-COOH, the inhibition laser power is decreased from 5 mW to 3 mW, while the achievable minimum feature size is increased from 121 nm to 48 nm. This innovative approach holds significant promise for the development of sub-diffraction MWCNTs/polymer composite-based devices in the fields of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS).

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来源期刊

Optik 物理-光学

CiteScore

6.90

自引率

12.90%

发文量

1471

审稿时长

46 days

期刊介绍： Optik publishes articles on all subjects related to light and electron optics and offers a survey on the state of research and technical development within the following fields: Optics: -Optics design, geometrical and beam optics, wave optics- Optical and micro-optical components, diffractive optics, devices and systems- Photoelectric and optoelectronic devices- Optical properties of materials, nonlinear optics, wave propagation and transmission in homogeneous and inhomogeneous materials- Information optics, image formation and processing, holographic techniques, microscopes and spectrometer techniques, and image analysis- Optical testing and measuring techniques- Optical communication and computing- Physiological optics- As well as other related topics.