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引用次数: 0
摘要
经证实，半导体气体传感器在交流阻抗测量中具有较高的线性度和稳定的基线。然而，目前仍缺乏确定交流阻抗测量最佳参数的程序。本研究以检测 SF6 分解气体为例，建立了交流阻抗测量下的半导体气体传感器模型。采用四种传感器检测三种气体（H2S、SO2 和 CO），验证了优化方法的有效性。交流阻抗测量法具有线性度高、基线稳定的特点，可在 10 至 30 °C 的环境温度范围内快速修正温度漂移。总之，所提出的方法为抑制半导体气体传感器的漂移失效提供了一种新方法。
Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement
Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF6 decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H2S, SO2, and CO), the effectiveness of the optimization method has been validated, as well. With the high linearity and stable baseline obtained from AC impedance measurement, it enables rapid correction of temperature drift within environmental temperatures ranging from 10 to 30 °C. Overall, the proposed method can provide a novel approach to inhibit the drift failure of semiconductor gas sensors.
期刊介绍：
ACS Sensors is a peer-reviewed research journal that focuses on the dissemination of new and original knowledge in the field of sensor science, particularly those that selectively sense chemical or biological species or processes. The journal covers a broad range of topics, including but not limited to biosensors, chemical sensors, gas sensors, intracellular sensors, single molecule sensors, cell chips, and microfluidic devices. It aims to publish articles that address conceptual advances in sensing technology applicable to various types of analytes or application papers that report on the use of existing sensing concepts in new ways or for new analytes.
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