基于激光光谱传感的新型锥形石英音叉

IF 11.9 1区 物理与天体物理 Q1 PHYSICS, APPLIED Applied physics reviews Pub Date : 2024-10-23 DOI:10.1063/5.0214874
Yufei Ma, Shunda Qiao, Runqiu Wang, Ying He, Chao Fang, Tiantian Liang
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引用次数: 0

摘要

为了提高基于 QTF 的激光光谱分析中的应力大小和电荷分布,我们设计了一种新型锥形石英音叉(QTF),它具有 7.83 kHz 的低谐振频率和较宽的叉隙,可实现较长的能量积累时间和轻松的光学对准。与已报道的矩形 QTF 相比,这种锥形 QTF 将最大应力位置从根部转移到中部,从而提高了传感性能。此外,这种独特的设计还消除了标准 QTF 中通常存在的 90° 直角,因为这种直角在蚀刻过程中通常会导致不希望出现的 "网状 "和 "面状"。这种设计减少了意外残留材料的存在,从而最大程度地降低了性能。为了验证 QTF 的性能,我们采用了基于 QTF 的石英增强光声光谱法(QEPAS)和光诱导热弹性光谱法(LITES)。与广泛使用的标准 QTF 相比,锥形 QTF 的总表面电荷在 QEPAS 和 LITES 模拟中分别提高了 5.08 倍和 5.69 倍。实验表明,与基于标准 QTF 的系统相比,这种基于锥形 QTF 的 QEPAS 传感器的信噪比 (SNR) 提高了 3.02 倍。在这种基于 QTF 的锥形 QEPAS 传感器中加入声学微谐振器后,信号水平提高了 97.20 倍。乙炔(C2H2)检测的最低检测限 (MDL) 被确定为 16.45 ppbv。在 LITES 技术中,与标准 QTF 相比,这种基于锥形 QTF 的传感器的信噪比提高了 3.60 倍。C2H2 检测的 MDL 被确定为 146.39 ppbv。
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A novel tapered quartz tuning fork-based laser spectroscopy sensing
A novel tapered quartz tuning fork (QTF) was designed to enhance its stress magnitude and charge distribution in QTF-based laser spectroscopy, which had a low resonant frequency of 7.83 kHz and a wide fork gap for long energy accumulation time and easy optical alignment. Compared to the reported rectangular QTF, this tapered QTF transfers the maximum stress position from the root to the middle to improve its sensing performance. Furthermore, the unique design eliminates the 90° right angles typically found in standard QTFs, which often lead to undesired “webs” and “facets” during the etching process. This design minimizes performance degradation by reducing the presence of residual unexpected materials. QTF-based laser spectroscopy of quartz-enhanced photoacoustic spectroscopy (QEPAS) and light-induced thermoelastic spectroscopy (LITES) were adopted to verify its performance. Compared with the widely used standard QTF, the total surface charge of the tapered QTF was improved 5.08 times and 5.69 times in QEPAS and LITES simulations, respectively. Experiments revealed that this tapered QTF-based QEPAS sensor had a 3.02 times improvement in signal-to-noise-ratio (SNR) compared to the standard QTF-based system. Adding an acoustic micro-resonator to this tapered QTF-based QEPAS sensor improved the signal level by 97.20 times. The minimum detection limit (MDL) for acetylene (C2H2) detection was determined to be 16.45 ppbv. In the LITES technique, compared to the standard QTF, this tapered QTF-based sensor had a 3.60 times improvement in SNR. The MDL for C2H2 detection was determined to be 146.39 ppbv.
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来源期刊
Applied physics reviews
Applied physics reviews PHYSICS, APPLIED-
CiteScore
22.50
自引率
2.00%
发文量
113
审稿时长
2 months
期刊介绍: Applied Physics Reviews (APR) is a journal featuring articles on critical topics in experimental or theoretical research in applied physics and applications of physics to other scientific and engineering branches. The publication includes two main types of articles: Original Research: These articles report on high-quality, novel research studies that are of significant interest to the applied physics community. Reviews: Review articles in APR can either be authoritative and comprehensive assessments of established areas of applied physics or short, timely reviews of recent advances in established fields or emerging areas of applied physics.
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