Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen Flows.

To improve the performance of valves in relation to the leakage rate, a comprehensive evaluation of the valve characteristics and behavior during pressure exposure is important. Often, these low gas flow rates below 0.1 cm³/min cannot be accurately measured with conventional flow sensors. This paper presents a small and low-cost test rig for measuring gas leakage rates accurately, even far below 0.1 cm³/min, with the pressure decay method. These leakage flows are substantiated with a flow model, where we demonstrate the feasibility of modeling those gas flows with an extended Navier-Stokes framework to obtain more accurate theoretical predictions. As expected, the comparison to the experimental results proves that the classical Navier-Stokes system is unsuitable for modeling Knudsen flows. Hence, self-diffusion of gas, a wall-slip boundary condition, and an effective mean free path model were introduced in a physically evident manner. In terms of the calculated mass flow, while self-diffusion and slip boundary conditions explain deviations from the classical Navier-Stokes equation for Knudsen numbers already smaller than 1, the effective mean free path model has an effect, especially when Kn > 1. For simplified conditions, an analytical solution was presented and compared to the results of an OpenFOAM CFD-solver for flow rates through more complex gap-flow geometries of the flap valve. Hereby, acceptable deviations between 10% and 20% were observed. A comparison with measurement results was carried out. The reproducibility of the measurement method was verified by comparing multiple measurements of one silicon microvalve sample to a state-of-the-art flow sensor. Three geometrically similar passive silicon microvalves were measured with air overpressure decreasing from 15 kPa relative to atmospheric pressure. Maximum gas volume flowing in a blocking direction of 1-26 µL/min with high reproducibility and marginal noise were observed.