光子捕获探测器

IF 32.3 1区物理与天体物理 Q1 OPTICS Nature Photonics Pub Date : 2024-10-31 DOI:10.1038/s41566-024-01560-6

Noriaki Horiuchi

引用次数: 0

摘要

增强型光电探测器是在硅绝缘体衬底上制造的，衬底包括 3 微米的二氧化硅层和 1.5 微米的硅器件层。在此基础上，通过蒸发工艺沉积了一层 80 纳米的硒化铅薄膜。通过离子蚀刻形成了正方形晶格的孔阵列。孔的深度为 150 纳米。中国科学家制作了三个器件：一个不带孔阵列，两个带孔，直径（d）/晶格周期（p）值分别为 700/1,000 nm 和 700/2,333 nm。在顶层放置了两组独立的金金属指标，作为间隙电极，以便在硒化铅薄膜中产生电场。研究小组测量并比较了这三种器件在不同波长下的探测性能。研究人员发现，与基于有限差分时域法的数值模拟结果一致，光电探测器的峰值吸收波长随着晶格周期的增加而增加。当晶格周期为 1,000 nm、1,280 nm 和 1,520 nm 时，850 nm、1,064 nm、1,310 nm 和 1,550 nm 处的吸收率分别超过 90%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nature Photonics 物理-光学

CiteScore

54.20

自引率

1.70%

发文量

158

审稿时长

12 months

期刊介绍： Nature Photonics is a monthly journal dedicated to the scientific study and application of light, known as Photonics. It publishes top-quality, peer-reviewed research across all areas of light generation, manipulation, and detection. The journal encompasses research into the fundamental properties of light and its interactions with matter, as well as the latest developments in optoelectronic devices and emerging photonics applications. Topics covered include lasers, LEDs, imaging, detectors, optoelectronic devices, quantum optics, biophotonics, optical data storage, spectroscopy, fiber optics, solar energy, displays, terahertz technology, nonlinear optics, plasmonics, nanophotonics, and X-rays. In addition to research papers and review articles summarizing scientific findings in optoelectronics, Nature Photonics also features News and Views pieces and research highlights. It uniquely includes articles on the business aspects of the industry, such as technology commercialization and market analysis, offering a comprehensive perspective on the field.

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