R. Chanson, M. Bouvier, F. Miserque, F. Rouillard, F. Schuster
{"title":"通过 DLI-MOCVD 沉积的钴和钴锰氧化物涂层厚度对 SOC 互连中防止铬扩散的影响","authors":"R. Chanson, M. Bouvier, F. Miserque, F. Rouillard, F. Schuster","doi":"10.1007/s11085-024-10316-0","DOIUrl":null,"url":null,"abstract":"<div><p>The influence of cobalt and cobalt–manganese oxide coating thickness on its ability to be a good diffusion barrier against Cr outward diffusion was investigated for stainless steel interconnects (AISI 441) of a solid oxide cell (SOC). The coatings were all synthesized using a DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition) hot wall reactor. The study shows that a minimum cobalt oxide thickness of 300 nm was needed to be a good diffusion barrier against Cr for the 500-h exposure test. This observation was linked to the Mn concentration reached in the cobalt spinel during exposure. Indeed, during exposure at high temperature, Mn diffused from the substrate into the cobalt coating and transformed cobalt spinel into Co-Mn spinel. Whereas pure cobalt spinel was a good Cr diffusion barrier, cobalt-manganese spinel, Co<sub>3-x</sub>Mn<sub>x</sub>O<sub>4</sub>, was not when <i>x</i> > 2. The thickness of the cobalt coatings must be chosen so that the Mn quantity coming into it from diffusion from the substrate does not degrade the protectiveness of the coating.</p></div>","PeriodicalId":724,"journal":{"name":"Oxidation of Metals","volume":"101 6","pages":"1467 - 1478"},"PeriodicalIF":2.1000,"publicationDate":"2024-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s11085-024-10316-0.pdf","citationCount":"0","resultStr":"{\"title\":\"Influence of Cobalt and Cobalt–Manganese Oxide Coating Thickness Deposited by DLI-MOCVD as a Barrier Against Cr Diffusion for SOC Interconnect\",\"authors\":\"R. Chanson, M. Bouvier, F. Miserque, F. Rouillard, F. Schuster\",\"doi\":\"10.1007/s11085-024-10316-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The influence of cobalt and cobalt–manganese oxide coating thickness on its ability to be a good diffusion barrier against Cr outward diffusion was investigated for stainless steel interconnects (AISI 441) of a solid oxide cell (SOC). The coatings were all synthesized using a DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition) hot wall reactor. The study shows that a minimum cobalt oxide thickness of 300 nm was needed to be a good diffusion barrier against Cr for the 500-h exposure test. This observation was linked to the Mn concentration reached in the cobalt spinel during exposure. Indeed, during exposure at high temperature, Mn diffused from the substrate into the cobalt coating and transformed cobalt spinel into Co-Mn spinel. Whereas pure cobalt spinel was a good Cr diffusion barrier, cobalt-manganese spinel, Co<sub>3-x</sub>Mn<sub>x</sub>O<sub>4</sub>, was not when <i>x</i> > 2. The thickness of the cobalt coatings must be chosen so that the Mn quantity coming into it from diffusion from the substrate does not degrade the protectiveness of the coating.</p></div>\",\"PeriodicalId\":724,\"journal\":{\"name\":\"Oxidation of Metals\",\"volume\":\"101 6\",\"pages\":\"1467 - 1478\"},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2024-09-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://link.springer.com/content/pdf/10.1007/s11085-024-10316-0.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Oxidation of Metals\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11085-024-10316-0\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"METALLURGY & METALLURGICAL ENGINEERING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Oxidation of Metals","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1007/s11085-024-10316-0","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"METALLURGY & METALLURGICAL ENGINEERING","Score":null,"Total":0}
Influence of Cobalt and Cobalt–Manganese Oxide Coating Thickness Deposited by DLI-MOCVD as a Barrier Against Cr Diffusion for SOC Interconnect
The influence of cobalt and cobalt–manganese oxide coating thickness on its ability to be a good diffusion barrier against Cr outward diffusion was investigated for stainless steel interconnects (AISI 441) of a solid oxide cell (SOC). The coatings were all synthesized using a DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition) hot wall reactor. The study shows that a minimum cobalt oxide thickness of 300 nm was needed to be a good diffusion barrier against Cr for the 500-h exposure test. This observation was linked to the Mn concentration reached in the cobalt spinel during exposure. Indeed, during exposure at high temperature, Mn diffused from the substrate into the cobalt coating and transformed cobalt spinel into Co-Mn spinel. Whereas pure cobalt spinel was a good Cr diffusion barrier, cobalt-manganese spinel, Co3-xMnxO4, was not when x > 2. The thickness of the cobalt coatings must be chosen so that the Mn quantity coming into it from diffusion from the substrate does not degrade the protectiveness of the coating.
期刊介绍:
Oxidation of Metals is the premier source for the rapid dissemination of current research on all aspects of the science of gas-solid reactions at temperatures greater than about 400˚C, with primary focus on the high-temperature corrosion of bulk and coated systems. This authoritative bi-monthly publishes original scientific papers on kinetics, mechanisms, studies of scales from structural and morphological viewpoints, transport properties in scales, phase-boundary reactions, and much more. Articles may discuss both theoretical and experimental work related to gas-solid reactions at the surface or near-surface of a material exposed to elevated temperatures, including reactions with oxygen, nitrogen, sulfur, carbon and halogens. In addition, Oxidation of Metals publishes the results of frontier research concerned with deposit-induced attack. Review papers and short technical notes are encouraged.