The influence of trace levels of O2 and H2O, contamination in an inert gas heat treatment atmosphere on the oxidation behvaiour of IN718 was investigated. Heat treatments consisted of holding IN718 at 1050 °C for 2 h in a combined thermogravimetric balance and gas chromatography-mass spectrometer (GCMS). Furnace atmospheres explored included 22–703 ppm O2 and H2O concentrations of 23–387 ppm. The GCMS measurements were able to quantify the O2 and H2O concentrations during heat treatment and revealed that oxidation became measurable at approximately 800 °C. The oxidation rate was parabolic during the 1050 °C isotherm, increasing linearly with an increase in either O2 or H2O concentration up to a value of 480 ppm. Beyond 480 ppm the oxidation remained constant and equivalent to that reported in air. A two layer surface oxide structure consisting of Cr2O3 and TiNbO4 formed when the O2, and H2O content increased beyond 33 and 23 ppm respectively. Dry O2 conditions (i.e. H2O of approximately 25 ppm), caused spalling of the Cr2O3 oxide surface during cooling when the O2 ppm was 124 ppm or above. In higher H2O concentrations the Cr2O3 layer showed good adherence to the base metal and no cracking during cooling. The use of a He–5% H2 carrier gas did not alter the oxidation rate significantly, but did increase the H2O concentration, thus preventing oxide spalling during cooling.