4H-SiC 二极管中辐射诱导缺陷的 TCAD 建模

Philipp Gaggl , Jürgen Burin , Andreas Gsponer , Simon-Emanuel Waid , Richard Thalmeier , Thomas Bergauer
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引用次数: 0

摘要

与硅(Si)相比,4H 碳化硅(SiC)具有多种优势特性,例如较大的电荷载流子饱和速度、带隙和热导率,因此是一种很有吸引力的探测器材料。虽然目前对材料和模型参数的了解足以使用 TCAD 软件模拟未受辐照的 4H-SiC 材料,但由于诱导陷阱和重组中心的存在,还不存在能准确预测高水平辐照后性能下降的配置。尽管人们越来越努力地描述这类缺陷的引入和性质,但公布的结果往往相互矛盾。本研究以现有文献为基础,并根据中子辐照 4H-SiC 焊盘二极管的测量结果进行优化,提出了用于 TCAD 模拟的体辐射损伤模型。再现了实验观察到的效应,如探测器电容变平、整流特性丧失和电荷收集效率降低。EH4 中心被认为是 4H-SiC 中寿命的主要杀手,而仍有争议的 EH6、7 深层是供体类型的假设则得到了加强。
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TCAD modeling of radiation-induced defects in 4H-SiC diodes
4H silicon carbide (SiC) has several advantageous properties compared to silicon (Si) making it an appealing detector material, such as a larger charge carrier saturation velocity, bandgap, and thermal conductivity. While the current understanding of material and model parameters suffices to simulate unirradiated 4H-SiC using TCAD software, configurations accurately predicting performance degradation after high levels of irradiation due to induced traps and recombination centers do not exist. Despite increasing efforts to characterize the introduction and nature of such defects, published results are often contradictory. This work presents a bulk radiation damage model for TCAD simulation based on existing literature and optimized on measurement results of neutron-irradiated 4H-SiC pad diodes. Experimentally observed effects, such as flattening of the detector capacitance, loss of rectification properties, and degradation in charge collection efficiency, are reproduced. The EH4 center is suggested as a major lifetime killer in 4H-SiC, while the still controversial assumption of the EH6,7 deep-level being of donor type is reinforced.
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来源期刊
CiteScore
3.20
自引率
21.40%
发文量
787
审稿时长
1 months
期刊介绍: Section A of Nuclear Instruments and Methods in Physics Research publishes papers on design, manufacturing and performance of scientific instruments with an emphasis on large scale facilities. This includes the development of particle accelerators, ion sources, beam transport systems and target arrangements as well as the use of secondary phenomena such as synchrotron radiation and free electron lasers. It also includes all types of instrumentation for the detection and spectrometry of radiations from high energy processes and nuclear decays, as well as instrumentation for experiments at nuclear reactors. Specialized electronics for nuclear and other types of spectrometry as well as computerization of measurements and control systems in this area also find their place in the A section. Theoretical as well as experimental papers are accepted.
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